Process Development for Batch Production of Micro-Milling Tools Made of Silicon Carbide by Means of the Dry Etching Process

Downsized and complex micro-machining structures have to meet quality requirements concerning geometry and convince through increasing functionality. The development and use of cutting tools in the sub-millimeter range can meet these demands and contribute to the production of intelligent components in biomedical technology, optics or electronics. This article addresses the development of double-edged micro-cutters, which consist of a two-part system of cutter head and shaft. The cutting diameters are between 50 and 200 μm. The silicon carbide cutting heads are manufactured from the solid material using microsystem technology. The substrate used can be structured uniformly via photolithography, which means that 5200 homogeneous micro-milling heads can be produced simultaneously. This novel batch approach represents a contrast to conventionally manufactured micro-milling cutters. The imprint is taken by means of reactive ion etching using a mask made of electroplated nickel. Within this dry etching process, characteristic values such as the etch rate and flank angle of the structures are critical and will be compared in a parameter analysis. At optimal parameters, an anisotropy factor of 0.8 and an etching rate of 0.34 µm/min of the silicon carbide are generated. Finally, the milling heads are diced and joined. In the final machining tests, the functionality is investigated and any signs of wear are evaluated. A tool life of 1500 mm in various materials could be achieved. This and the milling quality achieved are in the range of conventional micro-milling cutters, which gives a positive outlook for further development

Multi-Jet Event Rates in Deep Inelastic Scattering and Determination of the Strong Coupling Constant

Jet event rates in deep inelastic ep scattering at HERA are investigated applying the modified JADE jet algorithm. The analysis uses data taken with the H1 detector in 1994 and 1995. The data are corrected for detector and hadronization effects and then compared with perturbative QCD predictions using next-to-leading order calculations. The strong coupling constant alpha_S(M_Z^2) is determined evaluating the jet event rates. Values of alpha_S(Q^2) are extracted in four different bins of the negative squared momentum transfer~\qq in the range from 40 GeV2 to 4000 GeV2. A combined fit of the renormalization group equation to these several alpha_S(Q^2) values results in alpha_S(M_Z^2) = 0.117+-0.003(stat)+0.009-0.013(syst)+0.006(jet algorithm).Comment: 17 pages, 4 figures, 3 tables, this version to appear in Eur. Phys. J.; it replaces first posted hep-ex/9807019 which had incorrect figure 4

Measurement of Leading Proton and Neutron Production in Deep Inelastic Scattering at HERA

Deep--inelastic scattering events with a leading baryon have been detected by the H1 experiment at HERA using a forward proton spectrometer and a forward neutron calorimeter. Semi--inclusive cross sections have been measured in the kinematic region 2 <= Q^2 <= 50 GeV^2, 6.10^-5 <= x <= 6.10^-3 and baryon p_T <= MeV, for events with a final state proton with energy 580 <= E' <= 740 GeV, or a neutron with energy E' >= 160 GeV. The measurements are used to test production models and factorization hypotheses. A Regge model of leading baryon production which consists of pion, pomeron and secondary reggeon exchanges gives an acceptable description of both semi-inclusive cross sections in the region 0.7 <= E'/E_p <= 0.9, where E_p is the proton beam energy. The leading neutron data are used to estimate for the first time the structure function of the pion at small Bjorken--x.Comment: 30 pages, 9 figures, 2 tables, submitted to Eur. Phys.

Jets and energy flow in photon-proton collisions at HERA

Properties of the hadronic final state in photoproduction events with large transverse energy are studied at the electron-proton collider HERA. Distributions of the transverse energy, jets and underlying event energy are compared to \overline{p}p data and QCD calculations. The comparisons show that the \gamma p events can be consistently described by QCD models including -- in addition to the primary hard scattering process -- interactions between the two beam remnants. The differential jet cross sections d\sigma/dE_T^{jet} and d\sigma/d\eta^{jet} are measured

Measurement of the e+e^{+} and e−e^{-} induced charged current cross-sections at HERA

The cross sections for the charged current processes ${e~{-}p}\rightarrow{\nu_e+hadrons}$ and, for the first time, ${e~{+}p}\rightarrow{\overline{\nu}_e+hadrons}$ are measured at HERA for transverse momenta larger than 25 GeV

Transverse energy and forward jet production in the low x regime at HERA

The production of transverse energy in deep inelastic scattering is measured as a function of the kinematic variables x and Q 2 using the H1 detector at the ep collider HERA. The results are compared to the different predictions based upon two alternative QCD evolution equations, namely the Dokshitzer-Gribov-Lipatov-Altarelli-Parisi (DGLAP) and the Balitsky-Fadin-Kuraev-Lipatov (BFKL) equations. In a pseudorapidity interval which is central in the hadronic centre of mass system between the current and the proton remnant fragmentation region the produced transverse energy increases with decreasing x for constant Q 2 . Such a behaviour can be explained with a QCD calculation based upon the BFKL ansatz. The rate of forward jets, proposed as a signature for BFKL dynamics, has been measured

Dijet event rates in deep inelastic scattering at HERA

Di-jet event rates have been measured for deep-inelastic scattering in the kinematic domain ~5 < Q^2 < ~100 GeV^2 and ~10^(-4) < x_Bj < ~10^(-2), and for jet transverse momenta squared p_t^2 > ~Q^2. The analysis is based on data collected with the H1 detector at HERA in 1994 corresponding to an integrated luminosity of about 2 pb^(-1). Jets are defined using a cone algorithm in the photon-proton centre of mass system requiring jet transverse momenta of at least 5 GeV. The di-jet event rates are shown as a function of Q^2 and x_Bj. Leading order models of point-like interacting photons fail to describe the data. Models which add resolved interacting photons or which implement the colour dipole model give a good description of the di-jet event rate. This is also the case for next-to-leading order calculations including contributions from direct and resolved photons.Comment: 22 pages, 5 figures, 1 table, submitted to Eur. Phys. J., corrected author lis

Measurement of the total photon-proton cross-section and its decomposition at 200-GeV center-of-mass energy

We present a new measurement of the total photoproduction cross section performed with the H1 detector at HERA. For an average centre of mass energy of 200GeV a value of $\sigma_{tot}~{\gamma{p}}= 165\pm2\pm11\mu$b has been obtained. A detailed analysis of the data in adequate kinematic regions enabled a decomposition of the total cross section in its elastic, single diffractive dissociation and remaining non-diffractive parts, based on safe assumptions on the double diffractive dissociation contribution

Comparison of deep inelastic scattering with photoproduction interactions at HERA

Photon-proton ( γp ) interactions with Q 2 5 GeV 2 are studied at the high energy electron-proton collider HERA. The transverse energy flow and relative rates of large rapidity gap events are compared in the two event samples. The observed similarity between γp and γ ∗ p interactions can be understood in a picture where the photon develops as a hadronic object. The transverse energy density measured in the central region of the collision, at η ∗ = 0 in the γ ∗ p centre of mass frame, is compared with data from hadron-hadron interactions as function of the CMS energy of the collision