FOUCAULT, Michel, Histoire de la sexualité. Tome I. La volonté du savoir

The interest of using polyimide as a sacrificial and anchoring layer is demonstrated for post-processing surface micromachining and for the incorporation of metallic nanowires into microsystems. In addition to properties like a high planarization factor, a good resistance to most non-oxidizing acids and bases, and CMOS compatibility, polyimide can also be used as a mold for nanostructures after ion track-etching. Moreover, specific polyimide grades, such as PI-2611 from HD Microsystems™, involve a thermal expansion coefficient similar to silicon and low internal stress. The process developed in this study permits higher gaps compared to the state-of-the-art, limits stiction problems with the substrate and is adapted to various top-layer materials. Most metals, semiconductors or ceramics will not be affected by the oxygen plasma required for polyimide etching. Released structures with vertical gaps from one to several tens of μm have been obtained, possibly using multiple layers of polyimide. Furthermore, patterned freestanding nanowires have been synthesized with diameters from 20 to 60 nm and up to 3 μm in length. These results have been applied to the fabrication of two specific devices: a generic nanomechanical testing lab-on-chip platform and a miniaturized ionization sensor

A networked wearable device for chemical multisensing

The present contribution illustrates the early stage activities of the project CONVERGENCE FLAG-ERA H2020. The project is aimed at improving the quality of healthcare during active life by preventing the development of diseases through earlier diagnosis of cardiovascular and/or neurodegenerative diseases, and meets the growing desire of consumers for a deeper awareness of their conditions; indeed, the extensive availability of smartphones and tablets and the technology therein incorporated enable the monitoring and transmission of vital parameters from the body of a patient to medical professionals. CONVERGENCE extends this concept, aiming to create a wireless and multifunctional wearable system, able to monitor, in addition to key parameters related to the individual physical condition (activity, core body temperature, electrolytes and biomarkers), even the chemical composition of the ambient air (NO x , CO x , particles). Herein is summarized the project activity, which involves ENEA group together with CEA (Commissariat à l’Energie Atomique, France) and UCL (Université catholique de Louvain, Belgium)