Measurements of hydrogen gas stopping efficiency for tin ions from laser-produced plasma

\u3cp\u3eExperimental studies of stopping of ion fluxes from laser-produced plasma by a low-pressure gas atmosphere are presented. A modification of the time-of-flight spectroscopy technique is proposed for the stopping cross-sectional measurements in the ion energy range of 0.1-10 keV. The application of the proposed technique is demonstrated for Sn ion stopping by H\u3csub\u3e2\u3c/sub\u3e gas. This combination of elements is of particular importance for the development of plasma-based sources of extreme ultraviolet radiation for lithographic applications.\u3c/p\u3