Liga method of forming high-contrast collimators and anti-scatter grids with high aspect ratio

The article deals with creation and application of high-contrast anti-scatter X-ray grids for X-ray imaging in the range of 20–200 keV from microfocus X-ray tubes. A prototype high-aspect-ratio nickel grid structure is used to consider the impact of anti-scatter grid on the directional patterns of the IMA-2-150D X-ray tube. The suppression of scattered radiation and narrowing of the directional radiation pattern are demonstrated. The contrast of the nickel prototype is apparently insuffi cient. The article presents LIGA methods for manufacturing anti-scatter X-ray grids made of gold in Siberian Synchrotron and Terahertz Radiation Centre. A method for forming resistive grid structures using deep X-ray lithography is described and test structures are shown. The development of manufacturing technology for anti-scatter X-ray grids is in progress