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1 research outputs found
RF plasma treatment of shallow ion-implanted layers of germanium
Author
A.N. Nazarov
Artamonov
+25 more
Chen
Claeys
Darby
Huang
Jacques
Jung
Lee
Lysenko
M. Shayesteh
Nazarov
Nazarov
Nazarov
P.M. Lytvyn
P.N. Okholin
Perez-Rodrıguez
R. Duffy
Richter
S.B. Kryvyi
S.I. Tiagulskyi
V.I. Glotov
V.O. Yuchymchuk
V.P. Kladko
V.S. Lysenko
Valakh
Wündisch
Publication venue
'Elsevier BV'
Publication date
Field of study
No full text
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