6 research outputs found
Dependence of RF breakdown curve on electrode geometry in CCP reactor
The results of experimental and theoretical study of RF capacitively coupled discharge breakdown in reactor for reactive ion etching of semiconductors are presented. Taking into account complex geometry of the reactor with asymmetric electrodes the main attention has been paid to influence of geometric factor on the breakdown curve. Experiments have shown that the geometry of the electrodes has impact on the breakdown curve only at lowest gas pressure (<50 mTorr). In cylindrical configuration the curve has a region of ambiguity, while for asymmetric configuration similar to GEC reference cell the low pressure part of the breakdown curve is almost vertical. The experimental data are compared to the numerical simulation results obtained using the particle-in-cell/Monte Carlo (PIC/MCC) code. The comparison shows qualitative consistence of the results with general tendency of theoretical curves to be slightly shifted to higher pressures that can be explained by simultaneous action of different kinds of electron emission from the electrodes, while we accounted only for secondary electron emission. Both theory and experiment show influence of secondary electron yield from different electrode materials (aluminum, steel, graphite) on the low-pressure part of the breakdown curve.ΠΡΠ΅Π΄ΡΡΠ°Π²Π»Π΅Π½Ρ ΡΠ΅Π·ΡΠ»ΡΡΠ°ΡΡ ΡΠΊΡΠΏΠ΅ΡΠΈΠΌΠ΅Π½ΡΠ°Π»ΡΠ½ΡΡ
ΠΈ ΡΠ΅ΠΎΡΠ΅ΡΠΈΡΠ΅ΡΠΊΠΈΡ
ΠΈΡΡΠ»Π΅Π΄ΠΎΠ²Π°Π½ΠΈΠΉ ΠΊΡΠΈΠ²ΠΎΠΉ Π·Π°ΠΆΠΈΠ³Π°Π½ΠΈΡ ΠΠ§-ΡΠ°Π·ΡΡΠ΄Π° Π² ΡΠ΅Π°ΠΊΡΠΎΡΠ΅ Π΄Π»Ρ ΠΈΠΎΠ½Π½ΠΎΠ³ΠΎ ΡΠ΅Π°ΠΊΡΠΈΠ²Π½ΠΎΠ³ΠΎ ΡΡΠ°Π²Π»Π΅Π½ΠΈΡ. Π‘ ΡΡΠ΅ΡΠΎΠΌ ΡΠ»ΠΎΠΆΠ½ΠΎΠΉ Π³Π΅ΠΎΠΌΠ΅ΡΡΠΈΠΈ ΡΠ΅Π°ΠΊΡΠΎΡΠ° Ρ Π°ΡΠΈΠΌΠΌΠ΅ΡΡΠΈΡΠ½ΡΠΌΠΈ ΡΠ»Π΅ΠΊΡΡΠΎΠ΄Π°ΠΌΠΈ ΠΎΡΠ½ΠΎΠ²Π½ΠΎΠ΅ Π²Π½ΠΈΠΌΠ°Π½ΠΈΠ΅ Π±ΡΠ»ΠΎ ΡΠ΄Π΅Π»Π΅Π½ΠΎ Π²Π»ΠΈΡΠ½ΠΈΡ Π³Π΅ΠΎΠΌΠ΅ΡΡΠΈΡΠ΅ΡΠΊΠΎΠ³ΠΎ ΡΠ°ΠΊΡΠΎΡΠ° Π½Π° ΠΊΡΠΈΠ²ΡΡ Π·Π°ΠΆΠΈΠ³Π°Π½ΠΈΡ ΡΠ°Π·ΡΡΠ΄Π°. ΠΠΊΡΠΏΠ΅ΡΠΈΠΌΠ΅Π½ΡΡ ΠΏΠΎΠΊΠ°Π·Π°Π»ΠΈ, ΡΡΠΎ Π³Π΅ΠΎΠΌΠ΅ΡΡΠΈΡ ΡΠ»Π΅ΠΊΡΡΠΎΠ΄ΠΎΠ² ΠΎΠΊΠ°Π·ΡΠ²Π°Π΅Ρ ΡΡΡΠ΅ΡΡΠ²Π΅Π½Π½ΠΎΠ΅ Π²Π»ΠΈΡΠ½ΠΈΠ΅ Π½Π° ΠΊΡΠΈΠ²ΡΡ Π·Π°ΠΆΠΈΠ³Π°Π½ΠΈΡ Π² ΠΎΠ±Π»Π°ΡΡΠΈ Π½ΠΈΠ·ΠΊΠΈΡ
Π΄Π°Π²Π»Π΅Π½ΠΈΠΉ ΡΠ°Π±ΠΎΡΠ΅Π³ΠΎ Π³Π°Π·Π° (<50 ΠΌΠ’ΠΎΡΡ). ΠΠ»Ρ ΡΠΈΠ»ΠΈΠ½Π΄ΡΠΈΡΠ΅ΡΠΊΠΎΠΉ Π³Π΅ΠΎΠΌΠ΅ΡΡΠΈΠΈ ΠΊΠ°ΠΌΠ΅ΡΡ Π² ΠΎΠ±Π»Π°ΡΡΠΈ Π½ΠΈΠ·ΠΊΠΈΡ
Π΄Π°Π²Π»Π΅Π½ΠΈΠΉ ΡΡΡΠ΅ΡΡΠ²ΡΠ΅Ρ ΠΎΠ±Π»Π°ΡΡΡ Π½Π΅ΠΎΠ΄Π½ΠΎΠ·Π½Π°ΡΠ½ΠΎΡΡΠΈ ΠΊΡΠΈΠ²ΠΎΠΉ Π·Π°ΠΆΠΈΠ³Π°Π½ΠΈΡ, Π² ΡΠΎ Π²ΡΠ΅ΠΌΡ ΠΊΠ°ΠΊ Π΄Π»Ρ Π°ΡΠΈΠΌΠΌΠ΅ΡΡΠΈΡΠ½ΠΎΠΉ ΠΊΠΎΠ½ΡΠΈΠ³ΡΡΠ°ΡΠΈΠΈ Π±Π»ΠΈΠ·ΠΊΠΎΠΉ ΠΊ GEC ΡΡΠ΅ΠΉΠΊΠ΅ Π½Π°Π±Π»ΡΠ΄Π°Π΅ΡΡΡ ΠΏΡΠ°ΠΊΡΠΈΡΠ΅ΡΠΊΠΈ Π²Π΅ΡΡΠΈΠΊΠ°Π»ΡΠ½ΡΠΉ ΡΠΎΡΡ Π½Π°ΠΏΡΡΠΆΠ΅Π½ΠΈΡ Π·Π°ΠΆΠΈΠ³Π°Π½ΠΈΡ ΡΠ°Π·ΡΡΠ΄Π° Ρ ΡΠΌΠ΅Π½ΡΡΠ΅Π½ΠΈΠ΅ΠΌ Π΄Π°Π²Π»Π΅Π½ΠΈΡ Π³Π°Π·Π°. ΠΠ°Π±Π»ΡΠ΄Π°Π΅ΡΡΡ ΠΊΠ°ΡΠ΅ΡΡΠ²Π΅Π½Π½ΠΎΠ΅ ΡΠΎΠ³Π»Π°ΡΠΈΠ΅ ΡΠΈΡΠ»Π΅Π½ΡΡ
ΡΠ°ΡΡΠ΅ΡΠΎΠ², ΠΏΠΎΠ»ΡΡΠ΅Π½ΡΡ
Ρ ΠΈΡΠΏΠΎΠ»ΡΠ·ΠΎΠ²Π°Π½ΠΈΠ΅ΠΌ particle-in-cell/Monte Carlo (PIC/MCC) ΠΊΠΎΠ΄Π°, Ρ ΡΠΊΡΠΏΠ΅ΡΠΈΠΌΠ΅Π½ΡΠΎΠΌ. ΠΠ±ΡΡΡ ΡΠ΅Π½Π΄Π΅Π½ΡΠΈΡ ΡΠΌΠ΅ΡΠ΅Π½ΠΈΡ ΡΠ°ΡΡΡΠ΅ΡΠ½ΡΡ
ΠΊΡΠΈΠ²ΡΡ
Π·Π°ΠΆΠΈΠ³Π°Π½ΠΈΡ Π² ΠΎΠ±Π»Π°ΡΡΡ Π±ΠΎΠ»Π΅Π΅ Π²ΡΡΠΎΠΊΠΈΡ
Π΄Π°Π²Π»Π΅Π½ΠΈΠΉ ΠΌΠΎΠΆΠ½ΠΎ ΠΎΠ±ΡΡΡΠ½ΠΈΡΡ Π½Π΅ΠΎΠ±Ρ
ΠΎΠ΄ΠΈΠΌΠΎΡΡΡΡ ΠΊΠΎΡΡΠ΅ΠΊΡΠ½ΠΎΠ³ΠΎ ΡΡΠ΅ΡΠ° ΡΠ°Π·Π»ΠΈΡΠ½ΡΡ
Π²ΠΈΠ΄ΠΎΠ² ΡΠ»Π΅ΠΊΡΡΠΎΠ½Π½ΠΎΠΉ ΡΠΌΠΈΡΡΠΈΠΈ Ρ ΡΠ»Π΅ΠΊΡΡΠΎΠ΄ΠΎΠ² Π²Π΄ΠΎΠΏΠΎΠ»Π½Π΅Π½ΠΈΠ΅ ΠΊ ΡΡΡΠ΅Π½Π½ΠΎΠΉ Π½Π°ΠΌΠΈ Π²ΡΠΎΡΠΈΡΠ½ΠΎΠΉ Π΅-Π΅-ΡΠΌΠΈΡΡΠΈΠΈ. Π ΡΠ΅ΠΎΡΠΈΡ, ΠΈ ΡΠΊΡΠΏΠ΅ΡΠΈΠΌΠ΅Π½Ρ ΠΏΠΎΠΊΠ°Π·ΡΠ²Π°ΡΡ ΡΡΡΠ΅ΡΡΠ²Π΅Π½Π½ΠΎΠ΅ Π²Π»ΠΈΡΠ½ΠΈΠ΅ Π²ΡΠΎΡΠΈΡΠ½ΠΎΠΉ ΡΠ»Π΅ΡΡΠΎΠ½Π½ΠΎΠΉ ΡΠΌΠΈΡΡΠΈΠΈ Π½Π° ΠΊΡΠΈΠ²ΡΡ Π·Π°ΠΆΠΈΠ³Π°Π½ΠΈΡ ΠΠ§-ΡΠ°Π·ΡΡΠ΄Π° Π² ΠΎΠ±Π»Π°ΡΡΠΈ Π½ΠΈΠ·ΠΊΠΈΡ
Π΄Π°Π²Π»Π΅Π½ΠΈΠΉ.ΠΡΠ΅Π΄ΡΡΠ°Π²Π»Π΅Π½Ρ ΡΠ΅Π·ΡΠ»ΡΡΠ°ΡΠΈ Π΅ΠΊΡΠΏΠ΅ΡΠΈΠΌΠ΅Π½ΡΠ°Π»ΡΠ½ΠΈΡ
ΡΠ° ΡΠ΅ΠΎΡΠ΅ΡΠΈΡΠ½ΠΈΡ
Π΄ΠΎΡΠ»ΡΠ΄ΠΆΠ΅Π½Ρ ΠΊΡΠΈΠ²ΠΎΡ Π·Π°ΠΏΠ°Π»ΡΠ²Π°Π½Π½Ρ ΠΠ§-ΡΠ°Π·ΡΡΠ΄Ρ Π² ΡΠ΅Π°ΠΊΡΠΎΡi Π΄Π»Ρ ΡΠΎΠ½Π½ΠΎΠ³ΠΎ ΡΠ΅Π°ΠΊΡΠΈΠ²Π½ΠΎΠ³ΠΎ ΡΡΠ°Π²Π»Π΅Π½Π½Ρ. Π ΡΡΠ°Ρ
ΡΠ²Π°Π½Π½ΡΠΌ ΡΠΊΠ»Π°Π΄Π½ΠΎΡ Π³Π΅ΠΎΠΌΠ΅ΡΡΡΡ ΡΠ΅Π°ΠΊΡΠΎΡΠ° Π· Π°ΡΠΈΠΌΠ΅ΡΡΠΈΡΠ½ΠΈΠΌΠΈ Π΅Π»Π΅ΠΊΡΡΠΎΠ΄Π°ΠΌΠΈ ΠΎΡΠ½ΠΎΠ²Π½Ρ ΡΠ²Π°Π³Ρ Π±ΡΠ»ΠΎ ΠΏΡΠΈΠ΄ΡΠ»Π΅Π½ΠΎ Π²ΠΏΠ»ΠΈΠ²Ρ Π³Π΅ΠΎΠΌΠ΅ΡΡΠΈΡΠ½ΠΎΠ³ΠΎ ΡΠ°ΠΊΡΠΎΡΠ° Π½Π° ΠΊΡΠΈΠ²Ρ Π·Π°ΠΏΠ°Π»ΡΠ²Π°Π½Π½Ρ ΡΠΎΠ·ΡΡΠ΄Ρ. ΠΠΊΡΠΏΠ΅ΡΠΈΠΌΠ΅Π½ΡΠΈ ΠΏΠΎΠΊΠ°Π·Π°Π»ΠΈ, ΡΠΎ Π³Π΅ΠΎΠΌΠ΅ΡΡΡΡ Π΅Π»Π΅ΠΊΡΡΠΎΠ΄ΡΠ² ΡΠΎΠ±ΠΈΡΡ ΡΡΡΠΎΡΠ½ΠΈΠΉ Π²ΠΏΠ»ΠΈΠ² Π½Π° ΠΊΡΠΈΠ²Ρ Π·Π°ΠΏΠ°Π»ΡΠ²Π°Π½Π½Ρ Π² ΠΎΠ±Π»Π°ΡΡΡ Π½ΠΈΠ·ΡΠΊΠΈΡ
ΡΠΈΡΠΊΡΠ² ΡΠΎΠ±ΠΎΡΠΎΠ³ΠΎ Π³Π°Π·Ρ (<50 ΠΌΠ’ΠΎΡΡ). ΠΠ»Ρ ΡΠΈΠ»ΡΠ½Π΄ΡΠΈΡΠ½ΠΎΡ Π³Π΅ΠΎΠΌΠ΅ΡΡΡΡ ΠΊΠ°ΠΌΠ΅ΡΠΈ Π² ΠΎΠ±Π»Π°ΡΡΡ Π½ΠΈΠ·ΡΠΊΠΈΡ
ΡΠΈΡΠΊΡΠ² ΡΡΠ½ΡΡ ΠΎΠ±Π»Π°ΡΡΡ Π½Π΅ΠΎΠ΄Π½ΠΎΠ·Π½Π°ΡΠ½ΠΎΡΡΡ ΠΊΡΠΈΠ²ΠΎΡ Π·Π°ΠΏΠ°Π»ΡΠ²Π°Π½Π½Ρ, Π² ΡΠΎΠΉ ΡΠ°Ρ ΡΠΊ Π΄Π»Ρ Π°ΡΠΈΠΌΠ΅ΡΡΠΈΡΠ½ΠΎΡ ΠΊΠΎΠ½ΡΡΠ³ΡΡΠ°ΡΡΡ Π±Π»ΠΈΠ·ΡΠΊΠΎΡ Π΄ΠΎ GEC ΠΎΡΠ΅ΡΠ΅Π΄ΠΊΡ ΡΠΏΠΎΡΡΠ΅ΡΡΠ³Π°ΡΡΡΡΡ ΠΏΡΠ°ΠΊΡΠΈΡΠ½ΠΎ Π²Π΅ΡΡΠΈΠΊΠ°Π»ΡΠ½Π΅ Π·ΡΠΎΡΡΠ°Π½Π½Ρ Π½Π°ΠΏΡΡΠ³ΠΈ Π·Π°ΠΏΠ°Π»ΡΠ²Π°Π½Π½Ρ ΡΠΎΠ·ΡΡΠ΄Ρ ΠΏΡΠΈ Π·ΠΌΠ΅Π½ΡΠ΅Π½Π½Ρ ΡΠΈΡΠΊΡ Π³Π°Π·Ρ. Π‘ΠΏΠΎΡΡΠ΅ΡΡΠ³Π°ΡΡΡΡΡ ΡΠΊΡΡΠ½Π° Π·Π³ΠΎΠ΄Π° ΡΠΈΡΠ΅Π»ΡΠ½ΠΈΡ
ΡΠΎΠ·ΡΠ°Ρ
ΡΠ½ΠΊiΠ², ΠΎΡΡΠΈΠΌΠ°Π½ΠΈΡ
Π· Π²ΠΈΠΊΠΎΡΠΈΡΡΠ°Π½Π½ΡΠΌ particle-in-cell/Monte Carlo (PIC / MCC) ΠΊΠΎΠ΄Ρ, Π· Π΅ΠΊΡΠΏΠ΅ΡΠΈΠΌΠ΅Π½ΡΠΎΠΌ. ΠΠ°Π³Π°Π»ΡΠ½Ρ ΡΠ΅Π½Π΄Π΅Π½ΡΡΡ Π·ΡΡΠ²Ρ ΡΠΎΠ·ΡΠ°Ρ
ΡΠ½ΠΊΠΎΠ²ΠΈΡ
ΠΊΡΠΈΠ²ΠΈΡ
Π·Π°ΠΏΠ°Π»ΡΠ²Π°Π½Π½Ρ Π² ΠΎΠ±Π»Π°ΡΡΡ Π±ΡΠ»ΡΡ Π²ΠΈΡΠΎΠΊΠΈΡ
ΡΠΈΡΠΊΡΠ² ΠΌΠΎΠΆΠ½Π° ΠΏΠΎΡΡΠ½ΠΈΡΠΈ Π½Π΅ΠΎΠ±Ρ
ΡΠ΄Π½ΡΡΡΡ ΠΊΠΎΡΠ΅ΠΊΡΠ½ΠΎΠ³ΠΎ Π²ΡΠ°Ρ
ΡΠ²Π°Π½Π½Ρ ΡΡΠ·Π½ΠΈΡ
Π²ΠΈΠ΄ΡΠ² Π΅Π»Π΅ΠΊΡΡΠΎΠ½Π½ΠΎΡ Π΅ΠΌΡΡΡΡ Π· Π΅Π»Π΅ΠΊΡΡΠΎΠ΄ΡΠ² Π² Π΄ΠΎΠΏΠΎΠ²Π½Π΅Π½Π½Ρ Π΄ΠΎ Π²ΡΠ°Ρ
ΠΎΠ²Π°Π½ΠΎΡ Π½Π°ΠΌΠΈ Π²ΡΠΎΡΠΈΠ½Π½ΠΎΡ Π΅-Π΅-Π΅ΠΌΡΡΡΡ. Π―ΠΊ ΡΠ΅ΠΎΡΡΡ, ΡΠ°ΠΊ Ρ Π΅ΠΊΡΠΏΠ΅ΡΠΈΠΌΠ΅Π½Ρ ΠΏΠΎΠΊΠ°Π·ΡΡΡΡ ΡΡΡΠΎΡΠ½ΠΈΠΉ Π²ΠΏΠ»ΠΈΠ² Π²ΡΠΎΡΠΈΠ½Π½ΠΎΡ Π΅Π»Π΅ΡΡΠΎΠ½Π½ΡΠΉ Π΅ΠΌΡΡΡΡ Π½Π° ΠΊΡΠΈΠ²Ρ Π·Π°ΠΏΠ°Π»ΡΠ²Π°Π½Π½Ρ ΠΠ§-ΡΠΎΠ·ΡΡΠ΄Ρ Π² ΠΎΠ±Π»Π°ΡΡΡ Π½ΠΈΠ·ΡΠΊΠΈΡ
ΡΠΈΡΠΊΡΠ²
The Cyber Economy: Opportunities and Challenges for Artificial Intelligence in the Digital Workplace
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