47 research outputs found

    Reply to Comment on "Exact analytic solution for the generalized Lyapunov exponent of the 2-dimensional Anderson localization"

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    We reply to comments by P.Markos˘\breve{s}, L.Schweitzer and M.Weyrauch [preceding paper] on our recent paper [J. Phys.: Condens. Matter 63, 13777 (2002)]. We demonstrate that our quite different viewpoints stem for the different physical assumptions made prior to the choice of the mathematical formalism. The authors of the Comment expect \emph{a priori} to see a single thermodynamic phase while our approach is capable of detecting co-existence of distinct pure phases. The limitations of the transfer matrix techniques for the multi-dimensional Anderson localization problem are discussed.Comment: 4 pages, accepted for publication in J.Phys.: Condens. Mat

    Annihilation of Immobile Reactants on the Bethe Lattice

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    Two-particle annihilation reaction, A+A -> inert, for immobile reactants on the Bethe lattice is solved exactly for the initially random distribution. The process reaches an absorbing state in which no nearest-neighbor reactants are left. The approach of the concentration to the limiting value is exponential. The solution reproduces the known one-dimensional result which is further extended to the reaction A+B -> inert.Comment: 12 pp, TeX (plain

    Analytical realization of finite-size scaling for Anderson localization. Does the band of critical states exist for d>2?

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    An analytical realization is suggested for the finite-size scaling algorithm based on the consideration of auxiliary quasi-1D systems. Comparison of the obtained analytical results with the results of numerical calculations indicates that the Anderson transition point is splitted into the band of critical states. This conclusion is supported by direct numerical evidence (Edwards and Thouless, 1972; Last and Thouless, 1974; Schreiber, 1985; 1990). The possibility of restoring the conventional picture still exists but requires a radical reinterpretetion of the raw numerical data.Comment: PDF, 11 page

    The Reaction-Diffusion Front for A+Bβ†’βˆ…A+B \to\emptyset in One Dimension

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    We study theoretically and numerically the steady state diffusion controlled reaction A+Bβ†’βˆ…A+B\rightarrow\emptyset, where currents JJ of AA and BB particles are applied at opposite boundaries. For a reaction rate Ξ»\lambda, and equal diffusion constants DD, we find that when Ξ»Jβˆ’1/2Dβˆ’1/2β‰ͺ1\lambda J^{-1/2} D^{-1/2}\ll 1 the reaction front is well described by mean field theory. However, for Ξ»Jβˆ’1/2Dβˆ’1/2≫1\lambda J^{-1/2} D^{-1/2}\gg 1, the front acquires a Gaussian profile - a result of noise induced wandering of the reaction front center. We make a theoretical prediction for this profile which is in good agreement with simulation. Finally, we investigate the intrinsic (non-wandering) front width and find results consistent with scaling and field theoretic predictions.Comment: 11 pages, revtex, 4 separate PostScript figure

    Segregation in diffusion-limited multispecies pair annihilation

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    The kinetics of the q species pair annihilation reaction (A_i + A_j -> 0 for 1 <= i < j <= q) in d dimensions is studied by means of analytical considerations and Monte Carlo simulations. In the long-time regime the total particle density decays as rho(t) ~ t^{- alpha}. For d = 1 the system segregates into single species domains, yielding a different value of alpha for each q; for a simplified version of the model in one dimension we derive alpha(q) = (q-1) / (2q). Within mean-field theory, applicable in d >= 2, segregation occurs only for q < 1 + (4/d). The only physical realisation of this scenario is the two-species process (q = 2) in d = 2 and d = 3, governed by an extra local conservation law. For d >= 2 and q >= 1 + (4/d) the system remains disordered and its density is shown to decay universally with the mean-field power law (alpha = 1) that also characterises the single-species annihilation process A + A -> 0.Comment: 35 pages (IOP style files included), 10 figures included (as eps files

    Symmetry and species segregation in diffusion-limited pair annihilation

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    We consider a system of q diffusing particle species A_1,A_2,...,A_q that are all equivalent under a symmetry operation. Pairs of particles may annihilate according to A_i + A_j -> 0 with reaction rates k_{ij} that respect the symmetry, and without self-annihilation (k_{ii} = 0). In spatial dimensions d > 2 mean-field theory predicts that the total particle density decays as n(t) ~ 1/t, provided the system remains spatially uniform. We determine the conditions on the matrix k under which there exists a critical segregation dimension d_{seg} below which this uniformity condition is violated; the symmetry between the species is then locally broken. We argue that in those cases the density decay slows down to n(t) ~ t^{-d/d_{seg}} for 2 < d < d_{seg}. We show that when d_{seg} exists, its value can be expressed in terms of the ratio of the smallest to the largest eigenvalue of k. The existence of a conservation law (as in the special two-species annihilation A + B -> 0), although sufficient for segregation, is shown not to be a necessary condition for this phenomenon to occur. We work out specific examples and present Monte Carlo simulations compatible with our analytical results.Comment: latex, 19 pages, 3 eps figures include

    ΠžΡΠ½ΠΎΠ²Π½Ρ‹Π΅ ΠΏΠΎΠ΄Ρ…ΠΎΠ΄Ρ‹ ΠΊ ΠΌΠΎΠ΄Π΅Π»ΠΈΡ€ΠΎΠ²Π°Π½ΠΈΡŽ формирования фоторСзистивной маски Π² Π²Ρ‹Ρ‡ΠΈΡΠ»ΠΈΡ‚Π΅Π»ΡŒΠ½ΠΎΠΉ Π»ΠΈΡ‚ΠΎΠ³Ρ€Π°Ρ„ΠΈΠΈ

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    The article gives an overview of the main currently used models for the formation of photoresist masks and the problems in which they are applied. The main stages of Β«full physicalΒ» modeling of mask formation are briefly considered in the case of both traditional DNQ photoresists and CA photoresists. The concept of compact models (VT5 and CM1), which predict the contour of the resist mask for a full-sized device topology is considered. Examples of some calculations using both full physical modeling and compact models are given. Using a full physical modeling of the resist mask formation the lithographic stack was optimized for a promising technological process. The optimum thickness ratios for the binary BARC used in the water immersion lithographic process are found. The problem of determining the optimal number of calibration structures that maximally cover the space of aerial image parameters was solved. To solve this problem, cluster analysis was used. Clustering was carried out using the k-means method. The optimal sample size was from 300 to 350 structures, the mean square error in this case is 1.4 nm, which slightly exceeds the noise of the process for 100 nm structures. Using SEM images for calibrating the VT5 model allows reducing the standard error of 40 structures to 1.18 nm.Π’ ΡΡ‚Π°Ρ‚ΡŒΠ΅ Π΄Π°Π½ ΠΎΠ±Π·ΠΎΡ€ основных ΠΌΠΎΠ΄Π΅Π»Π΅ΠΉ формирования фоторСзистивной маски, ΠΈΡΠΏΠΎΠ»ΡŒΠ·ΡƒΠ΅ΠΌΡ‹Ρ… Π² настоящСС врСмя, ΠΈ Π·Π°Π΄Π°Ρ‡, Π² ΠΊΠΎΡ‚ΠΎΡ€Ρ‹Ρ… ΠΎΠ½ΠΈ ΠΏΡ€ΠΈΠΌΠ΅Π½ΡΡŽΡ‚ΡΡ. ΠšΡ€Π°Ρ‚ΠΊΠΎ рассмотрСны этапы Β«ΠΏΠΎΠ»Π½ΠΎΠ³ΠΎΒ» модСлирования формирования маски, основанного Π½Π° Ρ„ΠΈΠ·ΠΈΠΊΠΎ-химичСских ΠΏΡ€ΠΈΠ½Ρ†ΠΈΠΏΠ°Ρ…, Π² случаС ΠΊΠ°ΠΊ Ρ‚Ρ€Π°Π΄ΠΈΡ†ΠΈΠΎΠ½Π½Ρ‹Ρ… Π½Π°Ρ„Ρ‚ΠΎΡ…ΠΈΠ½ΠΎΠ½Π΄ΠΈΠ°Π·ΠΈΠ΄ΠΎΠ²Ρ‹Ρ… фоторСзистов, Ρ‚Π°ΠΊ ΠΈ фоторСзистов с химичСским усилСниСм. РассмотрСна концСпция основных примСняСмых Π² настоящСС врСмя ΠΊΠΎΠΌΠΏΠ°ΠΊΡ‚Π½Ρ‹Ρ… ΠΌΠΎΠ΄Π΅Π»Π΅ΠΉ, ΠΏΡ€Π΅Π΄ΡΠΊΠ°Π·Ρ‹Π²Π°ΡŽΡ‰ΠΈΡ… ΠΊΠΎΠ½Ρ‚ΡƒΡ€ фоторСзистивной маски для ΠΏΠΎΠ»Π½ΠΎΡ€Π°Π·ΠΌΠ΅Ρ€Π½ΠΎΠΉ Ρ‚ΠΎΠΏΠΎΠ»ΠΎΠ³ΠΈΠΈ издСлия, Π° ΠΈΠΌΠ΅Π½Π½ΠΎ, ΠΌΠΎΠ΄Π΅Π»Π΅ΠΉ VT5 (Variable Threshold 5) ΠΈ CM1 (Compact Model 1). ΠŸΡ€ΠΈΠ²ΠΎΠ΄ΡΡ‚ΡΡ ΠΏΡ€ΠΈΠΌΠ΅Ρ€Ρ‹ Π½Π΅ΠΊΠΎΡ‚ΠΎΡ€Ρ‹Ρ… расчСтов с использованиСм ΠΊΠ°ΠΊ ΠΏΠΎΠ»Π½ΠΎΠ³ΠΎ модСлирования формирования маски, Ρ‚Π°ΠΊ ΠΈ ΠΊΠΎΠΌΠΏΠ°ΠΊΡ‚Π½Ρ‹Ρ… ΠΌΠΎΠ΄Π΅Π»Π΅ΠΉ. ΠŸΡ€ΠΈ ΠΏΠΎΠΌΠΎΡ‰ΠΈ ΠΏΠΎΠ»Π½ΠΎΠ³ΠΎ модСлирования формирования фоторСзистивной маски Π±Ρ‹Π» ΠΎΠΏΡ‚ΠΈΠΌΠΈΠ·ΠΈΡ€ΠΎΠ²Π°Π½ литографичСский стСк для пСрспСктивного тСхнологичСского процСсса. НайдСны ΠΎΠΏΡ‚ΠΈΠΌΠ°Π»ΡŒΠ½Ρ‹Π΅ ΡΠΎΠΎΡ‚Π½ΠΎΡˆΠ΅Π½ΠΈΡ Ρ‚ΠΎΠ»Ρ‰ΠΈΠ½ для Π±ΠΈΠ½Π°Ρ€Π½ΠΎΠ³ΠΎ Π°Π½Ρ‚ΠΈΠΎΡ‚Ρ€Π°ΠΆΠ°ΡŽΡ‰Π΅Π³ΠΎ слоя, примСняСмого Π² литографичСском процСссС с Π²ΠΎΠ΄Π½ΠΎΠΉ иммСрсиСй. ΠŸΡ€ΠΈ ΠΊΠ°Π»ΠΈΠ±Ρ€ΠΎΠ²ΠΊΠ΅ ΠΊΠΎΠΌΠΏΠ°ΠΊΡ‚Π½ΠΎΠΉ ΠΌΠΎΠ΄Π΅Π»ΠΈ VT5 Ρ€Π΅ΡˆΠ΅Π½Π° Π·Π°Π΄Π°Ρ‡Π° опрСдСлСния ΠΎΠΏΡ‚ΠΈΠΌΠ°Π»ΡŒΠ½ΠΎΠΉ Π²Ρ‹Π±ΠΎΡ€ΠΊΠΈ ΠΊΠ°Π»ΠΈΠ±Ρ€ΠΎΠ²ΠΎΡ‡Π½Ρ‹Ρ… структур, максимально ΠΎΡ…Π²Π°Ρ‚Ρ‹Π²Π°ΡŽΡ‰ΠΈΡ… пространство ΠΏΠ°Ρ€Π°ΠΌΠ΅Ρ‚Ρ€ΠΎΠ² оптичСского изобраТСния, ΠΈΡΠΏΠΎΠ»ΡŒΠ·ΡƒΡ ΠΏΡ€ΠΈ этом минимальноС количСство структур. Для Ρ€Π΅ΡˆΠ΅Π½ΠΈΡ ΡƒΠΊΠ°Π·Π°Π½Π½ΠΎΠΉ Π·Π°Π΄Π°Ρ‡ΠΈ использовался кластСрный Π°Π½Π°Π»ΠΈΠ·. ΠšΠ»Π°ΡΡ‚Π΅Ρ€ΠΈΠ·Π°Ρ†ΠΈΡ ΠΏΡ€ΠΎΠ²ΠΎΠ΄ΠΈΠ»Π°ΡΡŒ ΠΌΠ΅Ρ‚ΠΎΠ΄ΠΎΠΌ k-срСдних. ΠžΠΏΡ‚ΠΈΠΌΠ°Π»ΡŒΠ½Ρ‹ΠΉ Ρ€Π°Π·ΠΌΠ΅Ρ€ Π²Ρ‹Π±ΠΎΡ€ΠΊΠΈ составил ΠΎΡ‚ 300 Π΄ΠΎ 350 структур, срСднСквадратичная ошибка ΠΏΡ€ΠΈ этом составляСт 1,4 Π½ΠΌ, Ρ‡Ρ‚ΠΎ Π½Π΅Π·Π½Π°Ρ‡ΠΈΡ‚Π΅Π»ΡŒΠ½ΠΎ ΠΏΡ€Π΅Π²Ρ‹ΡˆΠ°Π΅Ρ‚ ΡˆΡƒΠΌ тСхнологичСского процСсса для 100 Π½ΠΌ структур. ИспользованиС БЭМ-ΠΊΠΎΠ½Ρ‚ΡƒΡ€ΠΎΠ² ΠΏΡ€ΠΈ ΠΊΠ°Π»ΠΈΠ±Ρ€ΠΎΠ²ΠΊΠ΅ ΠΌΠΎΠ΄Π΅Π»ΠΈ VT5 позволяСт ΡΠ½ΠΈΠ·ΠΈΡ‚ΡŒ ΡΡ€Π΅Π΄Π½Π΅ΠΊΠ²Π°Π΄Ρ€Π°Ρ‚ΠΈΡ‡Π΅ΡΠΊΡƒΡŽ ΠΎΡˆΠΈΠ±ΠΊΡƒ ΠΏΠΎ 40 структурам Π΄ΠΎ 1,18 Π½ΠΌ

    Fluctuation Kinetics in a Multispecies Reaction-Diffusion System

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    We study fluctuation effects in a two species reaction-diffusion system, with three competing reactions A+Aβ†’βˆ…A+A\rightarrow\emptyset, B+Bβ†’βˆ…B+B\rightarrow\emptyset, and A+Bβ†’βˆ…A+B\rightarrow\emptyset. Asymptotic density decay rates are calculated for d≀2d\leq 2 using two separate methods - the Smoluchowski approximation, and also field theoretic/renormalisation group (RG) techniques. Both approaches predict power law decays, with exponents which asymptotically depend only on the ratio of diffusion constants, and not on the reaction rates. Furthermore, we find that, for d<2d<2, the Smoluchowski approximation and the RG improved tree level give identical exponents. However, whereas the Smoluchowski approach cannot easily be improved, we show that the RG provides a systematic method for incorporating additional fluctuation effects. We demonstrate this advantage by evaluating one loop corrections for the exponents in d<2d<2, and find good agreement with simulations and exact results.Comment: LaTeX file (41 pages) + 13 postscript figures, uuencode
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