Advanced Edge Roughness Measurement Application for Mask Metrology

ABSTRACT With decreasing C qD dimensions the negative influence of line edge roughness (LER) and linewidth roughness (LWR) on CD uniformity and mean-to-target CD becomes more pronounced, since there is no corresponding reduction of roughness with dimension reduction. This applies to wafer metrology as well as to mask metrology. In order to better understand the types of roughness as well as the impact of the CD-SEM roughness measurement capabilities on the control of the mask process, the sensitivity and accuracy of the roughness analysis were qualified by comparing the measured mask roughness to the design for a dedicated LER test mask. This comparison is done for different LER amplitude and periodicity values and for reference structures without nominal LER using the built-in CD-SEM algorithms for LER characterization

Development of a reference concept for a solar-assisted hybrid cycle for the fossil fuel-fired power plant : A Case Study for Syrdaria Thermal Power Plant, Uzbekistan

In this study, two options of solar heat integration into an existing gas fired thermal power plant are investigated, namely integration into the last high pressure preheater and into the last low pressure preheater. Simulations of both options are done by using models set up in EbsilonProfessional and performing annual simulations with hourly time steps. Two operational schemes are considered for both options: utilization of solar heat to boost the electricity output or to save fossil fuel and keep the output constant. Comparison of the results from the models with solar heat integration with the results from the model of the fossil reference plant running under the same conditions provides the solar electricity as well as the fuel saving. These results show that integration of solar heat into the high pressure preheater will lead to higher conversion efficiency and higher annual solar output. The net conversion efficiency of solar heat is in the range of 33 to 34% and the economic evaluation based on cost assumptions from literature delivers LCOE values between 9 and 14.5 US ¢/kWh which is comparable to the values for large standalone CSP plants worldwide

Cerebrospinal Fluid Biomarkers in Relation to MRZ Reaction Status in Primary Progressive Multiple Sclerosis

The MRZ reaction (MRZR) comprises the three antibody indices (AIs) against measles, rubella, and varicella zoster virus, reflecting an intrathecal polyspecific B cell response highly specific for multiple sclerosis (MS). Thus, MRZR can be used to confirm a diagnosis of primary progressive MS (PPMS) but its pathophysiological and wider clinical relevance is unclear. This study aimed to investigate whether PPMS patients with a positive MRZR (MRZR+) differ from those with a negative MRZR (MRZR-) according to cerebrospinal fluid (CSF) biomarkers of B cell activity, neuroaxonal damage or glial activity, and clinical features. (1) Methods: In a multicenter PPMS cohort (n = 81) with known MRZR status, we measured B cell-activating factor (BAFF), chemokine CXC ligand 13 (CXCL-13), soluble B cell maturation antigen (sBCMA), soluble transmembrane activator and CAML interactor (sTACI), and chitinase-3-like protein 1 (CHI3L1) in the CSF with enzyme-linked immunosorbent assays (ELISAs). Glial fibrillary acidic protein (GFAP) and neurofilament light chain (NfL) were detected in serum and CSF using single molecule array (SIMOA) technology. (2) Results: MRZR+ patients (45.7% of all PPMS patients) revealed higher levels of NfL in CSF compared to MRZR- patients (54.3%). There were positive correlations between each of sBCMA, sTACI, and intrathecal immunoglobin G (IgG) synthesis. Additionally, NfL concentrations in serum positively correlated with those in CSF and those of GFAP in serum. However, MRZR+ and MRZR- patients did not differ concerning clinical features (e.g., age, disease duration, Expanded Disability Status Scale (EDSS) at diagnosis and follow-up); CSF routine parameters; CSF concentrations of BAFF, CXCL-13, sBCMA, sTACI, CHI3L1, and GFAP; or serum concentrations of GFAP and NfL. (3) Conclusions: In PPMS patients, MRZR positivity might indicate a more pronounced axonal damage. Higher levels of the soluble B cell receptors BCMA and transmembrane activator and CAML interactor (TACI) in CSF are associated with a stronger intrathecal IgG synthesis in PPMS