2 research outputs found
On-Chip Narrowband Thermal Emitter for Mid-IR Optical Gas Sensing
Efficient light sources compatible
to complementary metal oxide semiconductor (CMOS) technology are key
components for low-cost, compact mid-infrared gas sensing systems.
In this work we present an on-chip narrowband thermal light source
for the mid-infrared wavelength range by combining microelectromechanical
system (MEMS) heaters with metamaterial perfect emitter structures.
Exhibiting a resonance quality factor of 15.7 at the center wavelength
of 3.96 μm and an emissivity of 0.99, the demonstrated emitter
is a spectrally narrow and efficient light source. We show temperature-stable
(resonance wavelength shift 0.04 nm/°C) and angular-independent
emission characteristics up to angles of 50° and provide an equivalent
circuit model illustrating the structure’s resonance behavior.
Owing to its spectrally tailored, nondispersive emission, additional
filter elements in a free-space optical gas sensing setup become obsolete.
In a proof-of-concept demonstration of such a filter-free gas sensing
system with CO<sub>2</sub> concentrations in the range of 0–50000
ppm, we observe a 5-fold increase in relative sensitivity compared
to the use of a conventional blackbody emitter. Our light source is
fully compatible with standard CMOS processes and tunable in emission
wavelength through the mid-infrared wavelength band. It paves the
way for a new class of highly integrated, low-cost optical gas sensors
Data File 1: Harnessing nonlinearities near material absorption resonances for reducing losses in plasmonic modulators
Refractive Index of 75%HD-BB-OH and 25%YLD124 Originally published in Optical Materials Express on 01 July 2017 (ome-7-7-2168