Bioimaging using full field and contact EUV and SXR microscopes with nanometer spatial resolution

We present our recent results, related to nanoscale imaging in the extreme ultraviolet (EUV) and soft X-ray (SXR) spectral ranges and demonstrate three novel imaging systems recently developed for the purpose of obtaining high spatial resolution images of nanoscale objects with the EUV and SXR radiations. All the systems are based on laser-plasma EUV and SXR sources, employing a double stream gas puff target. The EUV and SXR full field microscopes—operating at 13.8 nm and 2.88 nm wavelengths, respectively—are currently capable of imaging nanostructures with a sub-50 nm spatial resolution with relatively short (seconds) exposure times. The third system is a SXR contact microscope, operating in the “water-window” spectral range (2.3–4.4 nm wavelength), to produce an imprint of the internal structure of the investigated object in a thin surface layer of SXR light sensitive poly(methyl methacrylate) photoresist. The development of such compact imaging systems is essential to the new research related to biological science, material science, and nanotechnology applications in the near future. Applications of all the microscopes for studies of biological samples including carcinoma cells, diatoms, and neurons are presented. Details about the sources, the microscopes, as well as the imaging results for various objects will be shown and discussed

A stand-alone compact EUV microscope based on gas-puff target source

We report on a very compact desk-top transmission extreme ultraviolet (EUV) microscope based on a laser-plasma source with a double stream gas-puff target, capable of acquiring magnified images of objects with a spatial (half-pitch) resolution of sub-50 nm. A multilayer ellipsoidal condenser is used to focus and spectrally narrow the radiation from the plasma, producing a quasi-monochromatic EUV radiation (λ = 13.8 nm) illuminating the object, while a Fresnel zone plate objective forms the image. Design details, development, characterization and optimization of the EUV source and the microscope are described and discussed. Test object and other samples were imaged to demonstrate superior resolution compared to visible light microscopy. Lay description Developments in nanoscience demand tools capable of capturing images with a nanometer spatial resolution beyond the capability of well-known visible light microscopes. Herein, we present the design details, development, characterization and optimization of a very compact desk-top transmission microscope, operating in invisible to an eye radiation from the so called extreme ultraviolet (EUV) range. The apparatus is based on a laser-plasma source coupled with a special type of objective called Fresnel zone plate. It is capable of acquiring magnified images of objects with a spatial resolution of sub-50 nm, approximately 5–10 times better than the spatial resolution of classical visible light microscopes, in a short acquisition time. The main motivation for development of such compact systems operating with EUV radiations is the possibility to get information about thin samples due to the easily absorption of these radiation by solid materials with very small thicknesses, of the order of about 100 nm. Additionally, the employment of such kind of microscopes might open the possibility to perform experiments without necessity to employ large ‘photon facilities’ such as synchrotrons or free electron lasers and could have a huge impact on the speed of nanotechnology development. Imaging results, concerning nanostructures and biomedical samples, are presented and discussed

Applications of a compact "water window" source for investigations of nanostructures using SXR microscope

A compact soft X-ray microscope based on a nitrogen double-stream gas puff target soft X-ray source, operating at He-like nitrogen spectral line at the wavelength of λ =2.88 nm is presented. The desk-top size microscope was successfully demonstrated in transmission mode using the Fresnel zone-plate objective and it is suitable for soft X-ray source microscopy in the "water window" spectral range (λ = 2.3÷ 4.4 nm). Details about the soft X-ray source source, the microscope and an example of application in the biomedical field are shown and discussed