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    Reversible Changes in Resistance of Perovskite Nickelate NdNiO<sub>3</sub> Thin Films Induced by Fluorine Substitution

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    Perovskite nickel oxides are of fundamental as well as technological interest because they show large resistance modulation associated with phase transition as a function of the temperature and chemical composition. Here, the effects of fluorine doping in perovskite nickelate NdNiO<sub>3</sub> epitaxial thin films are investigated through a low-temperature reaction with polyvinylidene fluoride as the fluorine source. The fluorine content in the fluorinated NdNiO<sub>3–<i>x</i></sub>F<sub><i>x</i></sub> films is controlled with precision by varying the reaction time. The fully fluorinated film (<i>x</i> ≈ 1) is highly insulating and has a bandgap of 2.1 eV, in contrast to NdNiO<sub>3</sub>, which exhibits metallic transport properties. Hard X-ray photoelectron and soft X-ray absorption spectroscopies reveal the suppression of the density of states at the Fermi level as well as the reduction of nickel ions (valence state changes from +3 to +2) after fluorination, suggesting that the strong Coulombic repulsion in the Ni 3d orbitals associated with the fluorine substitution drives the metal-to-insulator transition. In addition, the resistivity of the fluorinated films recovers to the original value for NdNiO<sub>3</sub> after annealing in an oxygen atmosphere. By application of the reversible fluorination process to transition-metal oxides, the search for resistance-switching materials could be accelerated
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