Formation of memristor structures based on ZnO thin films by scratching probe nanolithography

This work was supported by Grant of the President of the Russian Federation No. MK-2721.2018.8. and by RFBR according to the research project № 18-37-0029

Formation and study of the RRAM memory elements by local anodic oxidation method

This work was supported by RFBR according to the research project № 18-37-00299 and by Grant of the President of the Russian Federation No. MK-2721.2018.8

Investigation of forming-free resistive switching of nanocrystalline hafnium oxide thin films

This work was supported by Grant of the President of the Russian Federation № MK-2721.2018.8 and RFBR (№ 18-37-00299 mol_а project). The results were obtained using the equipment of the Research and Education Center and Center for Collective Use "Nanotechnologies" of Southern Federal University

Investigation of profiling of nanostructures by scratching probe nanolithography and plasma chemical etching

Представлены результаты экспериментальных исследований режимов профилирования наноструктур методами силовой зондовой литографии и плазмохимического травления. Показано, что применение методов силовой зондовой литографии и плазмохимического травления позволяет профилировать поверхность кремния с характерными размерами 122±17 нм.This work presents the results of the experimental investigations nanostructure profiling using scratching probe nanolithography and plasma chemical etching. It is shown, combination of these methods allows to profile silicon surface with dimensions 122±17 nm.Работа выполнена при финансовой поддержке РФФИ (проекты № 16-32-00069 мол_а, № 16-29-14023 офи_м)

Atomic force microscopy of titanium oxide nanosize structures resistive switching

This work was supported by RFBR according to the research project № 18-37-00299 and by Grant of the President of the Russian Federation No. MK-2721.2018.8

Phase composition distribution simulation of titanium oxide nanosize structures obtained by the local anodic oxidation method

This work was supported by Grant of the President of the Russian Federation No. MK-2721.2018.8. and by RFBR according to the research project № 18-37-00299