Calculation of conditions for maintaining an ICRF-plasma using a self-consistent model

The article proposes a new approach to calculating the strength of the magnetic field on the inner wall of the discharge chamber, which is necessary to maintain a steady state of a low-pressure ICRF discharge. The model is treate as a nonlinear eigenproblem. The influence of the third type boundary conditions for electron density as well as and the nonlinear boundary conditions for electrical strength is considered. This approach makes it possible solving two problems of designing ICRF plasma torches: for a given electron density in the discharge find the magnetic field strength that ensures the maintenance of the discharge, or, conversely, at a given magnetic field strength, determine the value of the electron density that can be created in the discharge. In addition, the radial distributions of the electric and magnetic fields and the electron concentration can be determined

Experimental installation to study the RF plasma flow at low pressures with experiment data synchronization

© 2020 Published under licence by IOP Publishing Ltd. A diagram and description of an experimental setup for studying the properties of a stream of RF plasma at low pressure are presented. The setup is equipped with diagnostic devices that record the temperature, volt-ampere characteristics, and pressure in the chamber