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Experimental installation to study the RF plasma flow at low pressures with experiment data synchronization
Authors
Shemakhin A.Y.
Shemakhin E.Y.
+3 more
Sofronitsky A.O.
Terentev T.N.
Zheltukhin V.S.
Publication date
1 January 2020
Publisher
Abstract
© 2020 Published under licence by IOP Publishing Ltd. A diagram and description of an experimental setup for studying the properties of a stream of RF plasma at low pressure are presented. The setup is equipped with diagnostic devices that record the temperature, volt-ampere characteristics, and pressure in the chamber
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Last time updated on 03/05/2021