2,820 research outputs found

    The marching velocity of the capillary meniscus in a microchannel

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    In this paper we describe an experimental method and an analytical model for characterizing the surface energy inside a microchannel of micrometer size by measuring the marching velocity or position of a capillary meniscus. This method is based on the fact that the force summation of the meniscus surface tension and the filling reservoir gravitation might produce a pressure to pull liquid into the channel, and the marching velocity or the instantaneous position of the meniscus is related to the surface energy. Both parylene and silicon-nitride microchannels with different surface conditions were fabricated to perform the fill-in experiments subject to different liquids. It is shown that our model agrees well with the experimental data and is a valid method

    Recrystallized parylene as a mask for silicon chemical etching

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    This paper presents the first use of recrystallized parylene as masking material for silicon chemical etch. Recrystallized parylene was obtained by melting parylene C at 350°C for 2 hours. The masking ability of recrystallized parylene was tested in HNA (hydrofluoric acid, nitric acid and acetic acid) solution of various ratios, KOH (potassium hydroxide) solution and TMAH (tetramethylammonium hydroxide) at different temperatures and concentrations. It is found that interface between parylene and the substrate can be attacked, which results in undercuts. Otherwise, recrystallized parylene exhibited good adhesion to silicon, complete protection of unexposed silicon and silicon etching rates comparable to literature data

    Q-enhanced fold-and-bond MEMS inductors

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    This work presents a novel coil fabrication technology to enhance quality factor (Q factor) of microfabricated inductors for implanted medical wireless sensing and data/power transfer applications. Using parylene as a flexible thin-film device substrate, a post-microfabrication substrate folding-and-bonding method is developed to effectively increase the metal thickness of the surface-micromachined inductors, resulting in their lower self-resistance so their higher quality factor. One-fold-and-bond coils are successfully demonstrated as an example to verify the feasibility of the fabrication technology with measurement results in good agreements with device simulation. Depending on target specifications, multiple substrate folding-and-bonding can be extensively implemented to facilitate further improved electrical characteristics of the coils from single fabrication batch. Such Q-enhanced inductors can be broadly utilized with great potentials in flexible integrated wireless devices/systems for intraocular prostheses and other biomedical implants

    Study of ratio of tritium concentration in plants water to tritium concentration in air moisture for chronic atmospheric release of tritium

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    AbstractSpecific activity models (SA) are often used to estimate tritium concentration in the plants for chronic-release of atmospheric HTO in some regulatory models by some countries and commissions. In such models, a major assumption is that the value of specific activity of tritium of tritium oxide in vegetation to the specific activity of tritium of tritium oxide in air moisture is maintained at a constant ratio (R). The value of R is an important factor in determining tritium concentration and dose from chronic atmospheric release. But the value of R recommended is different from different models. Concentrations of tritium in plants will be have huge difference in plants because of the difference of the value of R, and this in turn would result in difference of ingestion dose via food chain. Some studies suggested that a site-specific distribution of R should be developed in suing a specific activity model. In this study, distribution of R is established for the Qinshan NPP Base. The environmental monitoring data of tritium concentration in five type plants (rapeseed, tea, cabbage, radish and rice) and air at three sampling points (Xiajiawan, Qinlian and Ganpu) around Qinshan NPP Base(QNNP) over a 4 years period as the basis for analysis, and the tritium ratio(R) between plant water and air moisture were determined. The results showed the average value of R of five plants were 0.103, 0.687, 1.055, 0.695 and 0.183 respectively. These values of R are mostly consistent with the law presented by foreign literature, only the value of R for cabbage is greater than the value of R for foliage vegetation presented by foreign reports. This is partly attributable to the difference of experimental conditions. The concentration of HTO of vegetations around QNNP could be assessed using the values of R recommended by this report for chronic release of atmospheric HTO

    Dielectric charging effects on Parylene electrostatic actuators

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    We report here the first characterization of dielectric charging effects on Parylene electrostatic actuators. High-resistivity Parylene in-between air gaps can cause undesirable charging effects due to air ionization when operating as electrostatic sensors/actuators at voltages as low as tens of volts. This undesirable effect can either lower the sensitivity of the sensor or increase the pull-in voltage of the actuator. It is further observed that Parylene actuators operating at high voltage could even show "bounce-back" and "pull-in voltage drift" problems. It is concluded that even for MEMS, attention must be paid to the operating voltages and the resistivity of the dielectrics
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