Electron-beam-induced patterned deposition of allylcyclopentadienyl palladium using scanning tunneling microscopy

Scanning tunneling microscopy has been used to study the electron-induced decomposition of allylcyclopentadienyl palladium [Pd(η3-C3H5)( η5-C5H5)] and subsequent deposition on a Si(111) surface. Deposition occurs via an electron impact mechanism on either the tip or surface, depending on the bias polarity, and is observed with voltages of 2.75 V. This is close to the predicted condensed phase dissociation energy of 2.3 eV for Pd(η3-C3H5)(η5-C5H5)→Pd+C3H5+C5H5. Metallic deposits of nanometer dimensions can be written on the surface. Deposition onto an electrochemically etched tip results in a narrow conductive secondary tip which gives improved spatial resolution when imaging high-aspect ratio features on the surface. ©1994 American Institute of Physics

Fabrication of large arrays of micron-scale magnetic features by selective area organometallic chemical vapor deposition

We demonstrate that it is possible to deposit a wide range of magnetic features, using photoassisted selective area organometallic chemical vapor deposition. Large arrays of identical micron-scale Ni features were deposited on a Si(111) wafer by this method. Their magnetic properties were studied by alternating gradient force magnetometry as well as magnetic force microscopy. Our morphological and magnetic measurements show that the structures are spatially well defined, and the magnetic properties are related to the structural shapes of the features. This method can be adapted to the fabrication of smaller-scale magnetic and electronic devices. ©1996 American Institute of Physics

Fabricating magnetic Co-Ni-C thin-film alloys by organometallic chemical vapor deposition

We have deposited CoxNiy-C films with a variety of compositions to verify dependence of the saturation magnetization on the composition. These experiments suggest that we can produce CoxNiy-C films with a variety of magnetic properties. The CoxNiy-C films were fabricated by ultraviolet decomposition of cobaltocene and nickelocene. We demonstrated that the photolytic decomposition of these metallocenes produces cyclopentadienyl (C5H5) species, consistent with recent studies of the energetics of the ligand metal bonds

Fabrication of ferromagnetic and antiferromagnetic chromium oxides by organometallic chemical vapor deposition

We have been able to fabricate CrO2 and Cr2O3 from ultraviolet photolytic and plasma-assisted decomposition of Cr(CO) 6 in an oxygen carrier gas. The composition of these films is uniform in composition and contains little contamination. Using magneto-optic Kerr effect measurements, we have been able to demonstrate that the CrO2 films are ferromagnetic