Mechanical, geometrical, and electrical characterization of silicon membranes for open stencil masks

Silicon membranes are used for stencil masks which are key to charged particle projection lithography, particularly for ion projection lithography, electron beam projection. Quantitative and qualitative determination of the mechanical properties of the true thickness, thickness variations (morphology), electrical conductivity and stress is critical to the development of next generation lithography. The metrology setup includes high accuracy thickness, refractive index and electrical conductivity measurement based on infrared variable angle spectroscopic ellipsometry, thickness variation characterization based on the Fizeau interferometric scheme and mechanical stress evaluation based on a novel double bulging technique

Thickness analysis of silicon membranes for stencil masks

Stencil masks are key to charged particle projection lithography, in particular for ion projection lithography. To fulfill pattern printing requirements in the sub-70 nm regime, excellent thickness uniformity and thermal emissivity control are critical parameters for high quality stencil mask fabrication. We propose and demonstrate a technique based on infrared variable angle spectroscopic ellipsometry (IR-VASE) to measure these parameters with adequate accuracy and precision. The refractive index of the Si membrane was evaluated using a Sellmeier dispersion model combined with a Drude model. Because of its spectral range from 2 to 33 μm, the IR-VASE method is sensitive to the thickness of layers as well as to the concentration and profile of Si membrane doping

Progress in spectroscopic ellipsometry: Applications from vacuum ultraviolet to infrared

Spectroscopic ellipsometry (SE) is a noncontact and nondestructive optical technique for thin film characterization. In the past 10 yr, it has migrated from the research laboratory into the semiconductor, data storage, display, communication, and optical coating industries. The wide acceptance of SE is a result of its flexibility to measure most material types: dielectrics, semiconductors, metals, superconductors, polymers, biological coatings, and even multilayers of these materials. Measurement of anisotropic materials has also made huge strides in recent years. Traditional SE measurements cover the ultraviolet, visible, and near infrared wavelengths. This spectral range is now acquired within seconds with high accuracy due to innovative optical configurations and charge coupled device detection. In addition, commercial SE has expanded into both the vacuum ultraviolet (VUV) and midinfrared (IR). This wide spectral coverage was achieved by utilizing new optical elements and detection systems, along with UV or Fourier transform IR light sources. Modern instrumentation is now available with unprecedented flexibility promoting a new range of possible applications. For example, the VUV spectral region is capable of characterizing lithographic materials for 157 nm photolithography. The VUV also provides increased sensitivity for thin layers (e.g., gate oxides or self-assembled monolayers) and allows investigation of high-energy electronic transitions. The infrared spectral region contains information about semiconductor doping concentration, phonon absorption, and molecular bond vibrational absorptions. In this work, we review the latest progress in SE wavelength coverage. Areas of significant application in both research and industrial fields will be surveyed, with emphasis on wavelength-specific information content

Assessing components of the natural environment of the Upper Danube and Upper Brahmaputra river basins

A comprehensive understanding of the interplay between the natural environment and the human dimension is one of the prerequisites to successful and sustaining IWRM practises in large river basins such as the Upper Brahmaputra river basin or the Upper Danube river basin. These interactions, their dynamics and changes, and the likely future scenarios were investigated in the BRAHMATWINN project with a series of tools from remote sensing and geoinformatics. An integrated assessment of main components of the natural environment in the two river basins as well as in five reference catchments within those basins, has led to the delineation of hydrological response units (HRUs). HRUs are spatial units bearing a uniform behaviour in terms of the hydrological response regime, as a function of physical parameters land use, soil type, water, vegetation cover and climate. Besides the delineated HRUs which are available in a spatially exhaustive manner for all reference catchments, the following information were provided as spatial layers: (1) uniform digital surface models of both the twinned basins and the reference catchments; (2) glacier areas and the magnitude of glacier loss; (3) mountain permafrost distribution and identification of areas particularly affected by permafrost thaw; (4) a consistent land use/land cover information in all reference catchments; and (5) the vulnerabilities of wetlands and groundwater in terms of anthropogenic impact and climate change

Himalayan Glaciers (India, Bhutan, Nepal): Satellite Observations of Thinning and Retreat

This chapter summarizes the current state of remote sensing of glaciers in the India, Nepal, and Bhutan regions of the Himalaya, and focuses on new methods for assessing glacier change. Glaciers in these Himalaya regions exhibit complex patterns of changes due to the unique and variable climatic, topographic, and glaciological parameters present in this region. The theoretical understanding of glaciers in the Himalaya is limited by lack of sufficient observations due to terrain breadth and complexity, severe weather conditions, logistic difficulties, and geopolitics. Mapping and assessing these glaciers with satellite imagery is also challenging due to inherent sensor limitations and information extraction issues. Thus, we still lack a complete understanding of the magnitude of feedbacks, and in some places even their sign, between climate changes and glacier response in this region. In this chapter we present the current status of glaciers in various climatic regimes of the Himalaya, ranging from the monsoon-influenced regions of the central-eastern Himalaya (Nepal, Garhwal, Sikkim, and Bhutan) through the monsoon transition zone of Himachal Pradesh (India), to the dry areas of Ladakh (western Himalaya). The case studies presented here illustrate the use of remote sensing and elevation data coupled with glaciermapping techniques for glacier area and elevation change detection and ice flow modeling in the context of the Himalaya

Himalayan Glaciers (India, Bhutan, Nepal): Satellite Observations of Thinning and Retreat

This chapter summarizes the current state of remote sensing of glaciers in the India, Nepal, and Bhutan regions of the Himalaya, and focuses on new methods for assessing glacier change. Glaciers in these Himalaya regions exhibit complex patterns of changes due to the unique and variable climatic, topographic, and glaciological parameters present in this region. The theoretical understanding of glaciers in the Himalaya is limited by lack of sufficient observations due to terrain breadth and complexity, severe weather conditions, logistic difficulties, and geopolitics. Mapping and assessing these glaciers with satellite imagery is also challenging due to inherent sensor limitations and information extraction issues. Thus, we still lack a complete understanding of the magnitude of feedbacks, and in some places even their sign, between climate changes and glacier response in this region. In this chapter we present the current status of glaciers in various climatic regimes of the Himalaya, ranging from the monsoon-influenced regions of the central–eastern Himalaya (Nepal, Garhwal, Sikkim, and Bhutan) through the monsoon transition zone of Himachal Pradesh (India), to the dry areas of Ladakh (western Himalaya). The case studies presented here illustrate the use of remote sensing and elevation data coupled with glaciermapping techniques for glacier area and elevation change detection and ice flow modeling in the context of the Himalaya