EUV Debris Mitigation using Magnetic Nulls

Next generation EUV sources for photolithography use light produced by laser-produced plasmas (LPP) from ablated tin droplets. A major challenge for extending the lifetime of these devices is mitigating damage caused by deposition of tin debris on the sensitive collection mirror. Especially difficult to stop are high energy (up to 10 keV) highly charged tin ions created in the plasma. Existing solutions include the use of stopping gas, electric fields, and magnetic fields. One common configuration consists of a magnetic field perpendicular to the EUV emission direction, but such a system can result in ion populations that are trapped rather than removed. We investigate a previously unconsidered mitigation geometry consisting of a magnetic null by performing full-orbit integration of the ion trajectories in an EUV system with realistic dimensions, and optimize the coil locations for the null configuration. The magnetic null prevents a fraction of ions from hitting the mirror comparable to that of the perpendicular field, but does not trap any ions due to the chaotic nature of ion trajectories that pass close to the null. This technology can potentially improve LPP-based EUV photolithography system efficiency and lifetime, and may allow for a different, more efficient formulation of buffer gas

Ideal relaxation of the Hopf fibration

Ideal MHD relaxation is the topology-conserving reconfiguration of a magnetic field into a lower energy state where the net force is zero. This is achieved by modeling the plasma as perfectly conducting viscous fluid. It is an important tool for investigating plasma equilibria and is often used to study the magnetic configurations in fusion devices and astrophysical plasmas. We study the equilibrium reached by a localized magnetic field through the topology conserving relaxation of a magnetic field based on the Hopf fibration in which magnetic field lines are closed circles that are all linked with one another. Magnetic fields with this topology have recently been shown to occur in non-ideal numerical simulations. Our results show that any localized field can only attain equilibrium if there is a finite external pressure, and that for such a field a Taylor state is unattainable. We find an equilibrium plasma configuration that is characterized by a lowered pressure in a toroidal region, with field lines lying on surfaces of constant pressure. Therefore, the field is in a Grad-Shafranov equilibrium. Localized helical magnetic fields are found when plasma is ejected from astrophysical bodies and subsequently relaxes against the background plasma, as well as on earth in plasmoids generated by e.g.\ a Marshall gun. This work shows under which conditions an equilibrium can be reached and identifies a toroidal depression as the characteristic feature of such a configuration