3-D coupled electric mechanics for MEMS: Applications of COSOLVE-EM

Micro-electro-mechanical systems (MEMS) are often designed on scales at which electrostatic forces are capable of moving or deforming the parts of the system. In this regime accurate prediction of device behavior may require 3D coupled simulations between the electrostatic and mechanical domains. We have recently developed CoSolve-EM, a coupled solver for 3D quasi-static electro-mechanics. In this paper, we demonstrate the application of CoSolve-EM to five classes of electro-mechanical problems that are often intractable to other techniques. These classes are: devices with electrostatic pull-in instabilities, devices in which precise deformations are required, devices driven by multiple conductors, capacitive sensors that make use of surface contact, and actuators that make use of surface contact

Dynamics of a close-loop controlled MEMS resonator

The dynamics of a close-loop electrostatic MEMS resonator, proposed as a platform for ultra sensitive mass sensors, is investigated. The parameter space of the resonator actuation voltage is investigated to determine the optimal operating regions. Bifurcation diagrams of the resonator response are obtained at five different actuation voltage levels. The resonator exhibits bi-stability with two coexisting stable equilibrium points located inside a lower and an upper potential wells. Steady-state chaotic attractors develop inside each of the potential wells and around both wells. The optimal region in the parameter space for mass sensing purposes is determined. In that region, steady-state chaotic attractors develop and spend most of the time in the safe lower well while occasionally visiting the upper well. The robustness of the chaotic attractors in that region is demonstrated by studying their basins of attraction. Further, regions of large dynamic amplification are also identified in the parameter space. In these regions, the resonator can be used as an efficient long-stroke actuator

Self-consistent temperature compensation for resonant sensors with application to quartz bulk acoustic wave chemical sensors

Since resonant sensors have a temperature sensitivity which is often greater than their sensitivity to the phenomena they are being used to detect, it is imperative to include either temperature control or temperature compensation in any resonant sensor system. The authors have developed a temperature-compensation scheme for resonant sensors which is amenable to integration into a resonator-driver integrated circuit. An integrated circuit incorporating this scheme has been designed, built, and tested

CHARGE CENTROID DETERMINATION IN FIELD-EFFECT EXPERIMENTS

This paper presents a new method for making field-effect measurements in low-conductivity materials. The method complements conventional field effect methods by providing for the determination of the charge centroid of the field-induced charge