11 research outputs found
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Dynamic Observation of Electrochemical Etching in Silicon
The authors have designed and constructed a TEM specimen holder in order to observe the process of pore formation in silicon. The holder incorporates electrical feedthroughs and a sealed reservoir for the electrolyte and accepts lithographically patterned silicon specimens. The authors describe the system and present preliminary, ex situ observations of the etching process
Recommended from our members
Dynamic observation of electrochemical etching in silicon
The authors have designed and constructed a TEM specimen holder in order to observe the process of pore formation in silicon. The holder incorporates electrical feedthroughs and a sealed reservoir for the electrolyte and accepts lithographically patterned silicon specimens. The authors describe the system and present preliminary, ex situ observations of the etching process