Integrated silicon thermopile infrared detectors

Electrical Engineering, Mathematics and Computer Scienc

Micro-Electro-Mechanical Systems

Micro-electro-mechanical systems (MEMS) or Microsystems technology (MST) is a fascinating and exciting field which significantly contributes to build a bridge between science and society. Physical properties and material characteristics are translated into structures and devices that can have a large positive impact on people’s lives. Silicon micromachining is largely responsible for the expansion of sensors and actuators into more complex systems and into areas not traditionally related to microelectronics, such as medicine, biology and transportation. The shift to 3D microstructures has not only added a physical third dimension to silicon planar technology, but it also added a third dimension in terms of functionality and applications.Electrical Engineering, Mathematics and Computer Scienc

Integrated MEMS: Opportunities & Challenges

Micro-elektronicaElectrical Engineering, Mathematics and Computer Scienc

Spray coating of photoresist for pattern transfer on high topography surfaces

Electrical Engineering, Mathematics and Computer Scienc

Technology and applications of micromachined silicon adaptive mirrors

The technology of low-cost high-quality micromachined adaptive mirrors is reported. Adaptive mirrors are fabricated by combining bulk silicon micromachining with standard electronics technologies. Mirrors with tens of control channels, having RMS initial deviation from plane of the order of ?/20 and a range of surface deflection of 10 to 20 ?m with linear frequency response in the range of 50 Hz to 1 kHz, are fabricated on standard PCB substrates. Advanced devices with hundreds of control channels, demanding integration of driver and switching electronics, are currently under developmentElectrical Engineering, Mathematics and Computer Scienc

Reflectance-based two-dimensional TiO2 photonic crystal liquid sensors

We propose and experimentally demonstrate a reflectance-based photonic crystal (PC) liquid sensor. The PC is made of two-dimensional TiO2 nanopillar arrays. Such a reflectance-based structure with large functional area not only simplifies the optical guiding but also enhances the sensor signal. A linear shift of reflectance peaks is found for liquids with refractive indices varying from 1.333 to 1.390 at wavelength near 1.5 ?m. Excellent agreement between measured values and the generated reflectance model at a fixed wavelength is obtained, indicating the high potential of these PC-based liquid sensors for biological and environmental applications.MicroelectronicsElectrical Engineering, Mathematics and Computer Scienc