Enhanced fatigue and retention in ferroelectric thin film memory capacitors by post-top electrode anneal treatment

Thin film ferroelectric capacitors comprising a ferroelectric film sandwiched between electrodes for nonvolatile memory operations are rendered more stable by subjecting the capacitors to an anneal following deposition of the top electrode. The anneal is done so as to form the interface between the ferroelectric film and the top electrode. Heating in an air oven, laser annealing, or electron bombardment may be used to form the interface. Heating in an air oven is done at a temperature at least equal to the crystallization temperature of the ferroelectric film. Where the ferroelectric film comprises lead zirconate titanate, annealing is done at about 550 to 600 C for about 10 to 15 minutes. The formation treatment reduces the magnitude of charge associated with the nonswitching pulse in the thin film ferroelectric capacitors. Reduction of this charge leads to significantly more stable nonvolatile memory operations in both digital and analog memory devices. The formation treatment also reduces the ratio of change of the charge associated with the nonswitching pulse as a function of retention time. These improved memory devices exhibit greater performance in retention and reduced fatigue in memory arrays

Deposition of thin films of multicomponent materials

Composite films of multicomponent materials, such as oxides and nitrides, e.g., lead zirconate titanate, are deposited by dc magnetron sputtering, employing a rotating substrate holder, which rotates relative to a plurality of targets, one target for each metal element of the multicomponent material. The sputtering is carried out in a reactive atmosphere. The substrates on which the layers are deposited are at ambient temperature. Following deposition of the composite film, the film is heated to a temperature sufficient to initiate a solid state reaction and form the final product, which is substantially single phase and substantially homogeneous

Enhanced fatigue and retention in ferroelectric thin film memory capacitors by post-top electrode anneal treatment

Thin film ferroelectric capacitors (10) comprising a ferroelectric film (18) sandwiched between electrodes (16 and 20) for nonvolatile memory operations are rendered more stable by subjecting the capacitors to an anneal following deposition of the top electrode (20). The anneal is done so as to form the interface (22) between the ferroelectric film and the top electrode. Heating in an air oven, laser annealing, or electron bombardment may be used to form the interface. Heating in an air oven is done at a temperature at least equal to the crystallization temperature of the ferroelectric film. Where the ferroelectric film comprises lead zirconate titanate, annealing is done at about 550.degree. to 600.degree. C. for about 10 to 15 minutes. The formation treatment reduces the magnitude of charge associated with the non-switching pulse in the thin film ferroelectric capacitors. Reduction of this charge leads to significantly more stable nonvolatile memory operations in both digital and analog memory devices. The formation treatment also reduces the ratio of change of the charge associated with the non-switching pulse as a function of retention time. These improved memory devices exhibit greater performance in retention and reduced fatigue in memory arrays

Method of producing high T(subc) superconducting NBN films

Thin films of niobium nitride with high superconducting temperature (T sub c) of 15.7 K are deposited on substrates held at room temperature (approx 90 C) by heat sink throughout the sputtering process. Films deposited at P sub Ar 12.9 + or - 0.2 mTorr exhibit higher T sub c with increasing P sub N2,I with the highest T sub c achieved at P sub n2,I= 3.7 + or - 0.2 mTorr and total sputtering pressure P sub tot = 16.6 + or - 0.4. Further increase of N2 injection starts decreasing T sub c

Bioinspired engineering of exploration systems for NASA and DoD

A new approach called bioinspired engineering of exploration systems (BEES) and its value for solving pressing NASA and DoD needs are described. Insects (for example honeybees and dragonflies) cope remarkably well with their world, despite possessing a brain containing less than 0.01% as many neurons as the human brain. Although most insects have immobile eyes with fixed focus optics and lack stereo vision, they use a number of ingenious, computationally simple strategies for perceiving their world in three dimensions and navigating successfully within it. We are distilling selected insect-inspired strategies to obtain novel solutions for navigation, hazard avoidance, altitude hold, stable flight, terrain following, and gentle deployment of payload. Such functionality provides potential solutions for future autonomous robotic space and planetary explorers. A BEES approach to developing lightweight low-power autonomous flight systems should be useful for flight control of such biomorphic flyers for both NASA and DoD needs. Recent biological studies of mammalian retinas confirm that representations of multiple features of the visual world are systematically parsed and processed in parallel. Features are mapped to a stack of cellular strata within the retina. Each of these representations can be efficiently modeled in semiconductor cellular nonlinear network (CNN) chips. We describe recent breakthroughs in exploring the feasibility of the unique blending of insect strategies of navigation with mammalian visual search, pattern recognition, and image understanding into hybrid biomorphic flyers for future planetary and terrestrial applications. We describe a few future mission scenarios for Mars exploration, uniquely enabled by these newly developed biomorphic flyers

Solid-state non-volatile electronically programmable reversible variable resistance device

A solid-state variable resistance device (10) whose resistance can be repeatedly altered by a control signal over a wide range, and which will remain stable after the signal is removed, is formed on an insulated layer (14), supported on a substrate (12) and comprises a set of electrodes (16a, 16b) connected by a layer (18) of material, which changes from an insulator to a conductor upon the injection of ions, covered by a layer (22) of material with insulating properties which permit the passage of ions, overlaid by an ion donor material (20). The ion donor material is overlaid by an insulating layer (24) upon which is deposited a control gate (26) located above the contacts. In a preferred embodiment, the variable resistance material comprises WO.sub.3, the ion donor layer comprises Cr.sub.2 O.sub.3, and the layers sandwiching the ion donor layer comprise silicon monoxide. When a voltage is applied to the gate, the resistance between the electrode contacts changes, decreasing with positive voltage and increasing with negative voltage

Progress in Insect-Inspired Optical Navigation Sensors

Progress has been made in continuing efforts to develop optical flight-control and navigation sensors for miniature robotic aircraft. The designs of these sensors are inspired by the designs and functions of the vision systems and brains of insects. Two types of sensors of particular interest are polarization compasses and ocellar horizon sensors. The basic principle of polarization compasses was described (but without using the term "polarization compass") in "Insect-Inspired Flight Control for Small Flying Robots" (NPO-30545), NASA Tech Briefs, Vol. 29, No. 1 (January 2005), page 61. To recapitulate: Bees use sky polarization patterns in ultraviolet (UV) light, caused by Rayleigh scattering of sunlight by atmospheric gas molecules, as direction references relative to the apparent position of the Sun. A robotic direction-finding technique based on this concept would be more robust in comparison with a technique based on the direction to the visible Sun because the UV polarization pattern is distributed across the entire sky and, hence, is redundant and can be extrapolated from a small region of clear sky in an elsewhere cloudy sky that hides the Sun

Cooperative Lander-Surface/Aerial Microflyer Missions for Mars Exploration

Concepts are being investigated for exploratory missions to Mars based on Bioinspired Engineering of Exploration Systems (BEES), which is a guiding principle of this effort to develop biomorphic explorers. The novelty lies in the use of a robust telecom architecture for mission data return, utilizing multiple local relays (including the lander itself as a local relay and the explorers in the dual role of a local relay) to enable ranges ~10 to 1,000 km and downlink of color imagery. As illustrated in Figure 1, multiple microflyers that can be both surface or aerially launched are envisioned in shepherding, metamorphic, and imaging roles. These microflyers imbibe key bio-inspired principles in their flight control, navigation, and visual search operations. Honey-bee inspired algorithms utilizing visual cues to perform autonomous navigation operations such as terrain following will be utilized. The instrument suite will consist of a panoramic imager and polarization imager specifically optimized to detect ice and water. For microflyers, particularly at small sizes, bio-inspired solutions appear to offer better alternate solutions than conventional engineered approaches. This investigation addresses a wide range of interrelated issues, including desired scientific data, sizes, rates, and communication ranges that can be accomplished in alternative mission scenarios. The mission illustrated in Figure 1 offers the most robust telecom architecture and the longest range for exploration with two landers being available as main local relays in addition to an ephemeral aerial probe local relay. The shepherding or metamorphic plane are in their dual role as local relays and image data collection/storage nodes. Appropriate placement of the landing site for the scout lander with respect to the main mission lander can allow coverage of extremely large ranges and enable exhaustive survey of the area of interest. In particular, this mission could help with the path planning and risk mitigation in the traverse of the long-distance surface explorer/rover. The basic requirements of design and operation of BEES to implement the scenarios are discussed. Terrestrial applications of such concepts include distributed aerial/surface measurements of meteorological events, i.e., storm watch, seismic monitoring, reconnaissance, biological chemical sensing, search and rescue, surveillance, autonomous security/ protection agents, and/or delivery and lateral distribution of agents (sensors, surface/subsurface crawlers, clean-up agents). Figure 2 illustrates an Earth demonstration that is in development, and its implementation will illustrate the value of these biomorphic mission concepts

Insect-Inspired Optical-Flow Navigation Sensors

Integrated circuits that exploit optical flow to sense motions of computer mice on or near surfaces ( optical mouse chips ) are used as navigation sensors in a class of small flying robots now undergoing development for potential use in such applications as exploration, search, and surveillance. The basic principles of these robots were described briefly in Insect-Inspired Flight Control for Small Flying Robots (NPO-30545), NASA Tech Briefs, Vol. 29, No. 1 (January 2005), page 61. To recapitulate from the cited prior article: The concept of optical flow can be defined, loosely, as the use of texture in images as a source of motion cues. The flight-control and navigation systems of these robots are inspired largely by the designs and functions of the vision systems and brains of insects, which have been demonstrated to utilize optical flow (as detected by their eyes and brains) resulting from their own motions in the environment. Optical flow has been shown to be very effective as a means of avoiding obstacles and controlling speeds and altitudes in robotic navigation. Prior systems used in experiments on navigating by means of optical flow have involved the use of panoramic optics, high-resolution image sensors, and programmable imagedata- processing computers

Development of Biomorphic Flyers

Biomorphic flyers have recently been demonstrated that utilize the approach described earlier in "Bio-Inspired Engineering of Exploration Systems" (NPO-21142), NASA Tech Briefs, Vol. 27, No. 5 (May 2003), page 54, to distill the principles found in successful, nature-tested mechanisms of flight control. Two types of flyers are being built, corresponding to the imaging and shepherding flyers for a biomorphic mission described earlier in "Cooperative Lander- Surface/Aerial Microflyer Missions for Mars Exploration" (NPO-30286), NASA Tech Briefs, Vol. 28, No. 5 (May 2004), page 36. The common features of these two types of flyers are that both are delta-wing airplanes incorporating bio-inspired capabilities of control, navigation, and visual search for exploration. The delta-wing design is robust to approx.40 G axial load and offers ease of stowing and packaging. The prototype that we have built recently is shown in the figure. Such levels of miniaturization and autonomous navigation are essential to enable biomorphic microflyers (<1 kg) that can be deployed in large numbers for distributed measurements and exploration of difficult terrain while avoiding hazards. Individual bio-inspired sensors that will be incorporated in a biomorphic flyer have been demonstrated recently. These sensors include a robust, lightweight (~6 g), and low-power (~40 mW) horizon sensor for flight stabilization. It integrates successfully the principles of the dragonfly ocelli. The ocelli are small eyes on the dorsal and forward regions of the heads of many insects. The ocelli are distinct from the compound eyes that are most commonly associated with insect vision. In many insects, the ocelli are little more than single-point detectors of short-wavelength light and behavioral responses to ocelli stimuli are hard to observe. The notable exception is found in dragonflies, where flight control is notably degraded by any interference with the ocellar system. Our team has discovered recently that the ocelli are a dedicated horizon sensor, with substantial optical processing and multiple spectral sensitivity. To our knowledge, this is the world s first demonstrated use of a "biomorphic ocellus" as a flight-stabilization system. The advantage of the ocelli over a similarly sized system of rate gyroscopes is that both attitude control and rate damping can be realized in one device. A full inertial unit and significant processing would otherwise be required to achieve the same effect. As a prelude to full autonomy, substantial stability augmentation is provided to the pilot at very low cost in terms of space, power, and mass. The sensor is about 40 times lighter than a comparable inertial attitude reference system. Other significant features of the biomorphic flyer shown in the figure include its ability to fly at high angles of attack ~30 and a deep wing chord which allows scaling to small size and low Reynold s number situations. Furthermore, the placement of the propulsion system near the center of gravity allows continued control authority at low speeds. These attributes make such biomorphic flyers uniquely suited to planetary and terrestrial exploration where small size and autonomous airborne operation are required