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1 research outputs found
Comparison of magnetron sputtering and ion beam sputtering on dispersive mirrors
Author
Chen Y.
Hahner D.
+5Â more
Pervak V.
Sakiew W.
Schrameyer S.
Starke K.
Trubetskov M.
Publication venue
'Springer Science and Business Media LLC'
Publication date
15/04/2020
Field of study
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MPG.PuRe
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