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2 research outputs found
Diffractive structures for testing nano-meter technology
Author
Arnaud
Betzig
+9Â more
Gale
Gale
Griffith
H.P. Herzig
Noponen
P. Blattner
P. Ehbets
Postek
S.S.H. Naqvi
Publication venue
'Elsevier BV'
Publication date
Field of study
Full text link
Crossref
Scanning spot metrology for testing of photolithographic masks
Author
Blattner P.
Herzig H. P.
Naqvi S.S.H.
Publication venue
'SPIE-Intl Soc Optical Eng'
Publication date
22/04/2009
Field of study
No full text
Infoscience - École polytechnique fédérale de Lausanne