hp-finite element method for simulating light scattering from complex 3D structures

Methods for solving Maxwell's equations are integral part of optical metrology and computational lithography setups. Applications require accurate geometrical resolution, high numerical accuracy and/or low computation times. We present a finite-element based electromagnetic field solver relying on unstructured 3D meshes and adaptive hp-refinement. We apply the method for simulating light scattering off arrays of high aspect-ratio nano-posts and FinFETs

A Rigorous Finite-Element Domain Decomposition Method for Electromagnetic Near Field Simulations

Rigorous computer simulations of propagating electromagnetic fields have become an important tool for optical metrology and design of nanostructured optical components. A vectorial finite element method (FEM) is a good choice for an accurate modeling of complicated geometrical features. However, from a numerical point of view solving the arising system of linear equations is very demanding even for medium sized 3D domains. In numerics, a domain decomposition method is a commonly used strategy to overcome this problem. Within this approach the overall computational domain is split up into smaller domains and interface conditions are used to assure continuity of the electromagnetic field. Unfortunately, standard implementations of the domain decomposition method as developed for electrostatic problems are not appropriate for wave propagation problems. In an earlier paper we therefore proposed a domain decomposition method adapted to electromagnetic field wave propagation problems. In this paper we apply this method to 3D mask simulation.Comment: 9 pages, 7 figures, SPIE conference Advanced Lithography / Optical Microlithography XXI (2008

Fundamental study on a thin-film ae sensor for measurement of behavior of a multi-pad contact slider

To study the fundamental dynamic characteristics of a multi-pad slider for contact recording, we developed a thin-film piezoelectric acoustic emission array sensor on an Si-suspension with an array pattern similar to that of contact pads. Experiments showed that the sensitivity of the sensor is about 0. 11 V/N (slider thickness: 0.2 mm) and that each array sensor designed here is not influenced by the acoustic waves which occur due to contact with other contact pads, so the contact or non-contact condition of each pad can be measured

Membranes fabricated with a deep single corrugation for package stress reduction and residual stress relief

Thin square membranes including a deep circular corrugation are realized and tested for application in a strain-based pressure sensor. Package-induced stresses are reduced and relief of the residual stress is obtained, resulting in a large pressure sensitivity and a reduced temperature sensitivity. Finite element method simulations were carried out, showing that the pressure-deflection behaviour of the structure is close to that of a circular membrane with clamped edge but free radial motion

Rigorous Simulations of 3D Patterns on Extreme Ultraviolet Lithography Masks

Simulations of light scattering off an extreme ultraviolet lithography mask with a 2D-periodic absorber pattern are presented. In a detailed convergence study it is shown that accurate results can be attained for relatively large 3D computational domains and in the presence of sidewall-angles and corner-roundings.Comment: SPIE Europe Optical Metrology, Conference Proceeding

Advanced Finite Element Method for Nano-Resonators

Miniaturized optical resonators with spatial dimensions of the order of the wavelength of the trapped light offer prospects for a variety of new applications like quantum processing or construction of meta-materials. Light propagation in these structures is modelled by Maxwell's equations. For a deeper numerical analysis one may compute the scattered field when the structure is illuminated or one may compute the resonances of the structure. We therefore address in this paper the electromagnetic scattering problem as well as the computation of resonances in an open system. For the simulation efficient and reliable numerical methods are required which cope with the infinite domain. We use transparent boundary conditions based on the Perfectly Matched Layer Method (PML) combined with a novel adaptive strategy to determine optimal discretization parameters like the thickness of the sponge layer or the mesh width. Further a novel iterative solver for time-harmonic Maxwell's equations is presented.Comment: 11 pages, 6 figures (see original publication for images with a better resolution

Evolution of a coherent array of Bose-Einstein Condensates in a magnetic trap

We investigate the evolution process of the interference pattern for a coherent array of Bose-Einstein condensates in a magnetic trap after the optical lattices are switched off. It is shown that there is a decay and revival of the density oscillation for the condensates confined in the magnetic trap. We find that, due to the confinement of the magnetic trap, the interference effect is much stronger than that of the experiment induced by Pedri et al. (Phys. Rev. Lett, {\bf 87}, 220401), where the magnetic trap is switched off too. The interaction correction to the interference effect is also discussed for the density distribution of the central peak.Comment: RevTex, 17 pages,9 figures. E-mail: [email protected]

Finite-Element Simulations of Light Propagation through Circular Subwavelength Apertures

Light transmission through circular subwavelength apertures in metallic films with surrounding nanostructures is investigated numerically. Numerical results are obtained with a frequency-domain finite-element method. Convergence of the obtained observables to very low levels of numerical error is demonstrated. Very good agreement to experimental results from the literature is reached, and the utility of the method is demonstrated in the investigation of the influence of geometrical parameters on enhanced transmission through the apertures