Methods for solving Maxwell's equations are integral part of optical
metrology and computational lithography setups. Applications require accurate
geometrical resolution, high numerical accuracy and/or low computation times.
We present a finite-element based electromagnetic field solver relying on
unstructured 3D meshes and adaptive hp-refinement. We apply the method for
simulating light scattering off arrays of high aspect-ratio nano-posts and
FinFETs
