Performance of thermally excited resonators

A study of electrothermal excitation of micromachined silicon beams is reported. The temperature distribution is calculated as a function of the position of the transducer, resulting in stress in the structure which reduces the resonance frequency. Test samples are realized and measurements of resonance frequency, vibration shape and vibration amplitude are carried out. There is a satisfactory agreement between theory and experiment at small thermal stresses. Near the buckling load we find distinct deviations from theory which are ascribed to mechanical imperfections of the beams

Realization of mechanical decoupling zones for package-stress reduction

The realization of mechanical decoupling zones around a membrane to reduce package stresses is presented. Wet-isotropic etching with a nitric/fluoridic solution (HNO3/HF/H2O) as well as reactive-ion etching (RIE) with a sulphurhexafluoride/oxygen (SF6/O2) plasma are investigated to realize deep circular grooves. The shape of the cross section of the groove, which determines the shape of the decoupling zone, can be controlled using the RIE method by changing the etch conditions. It is shown that a large undercut at low pressures as well as a small undercut at high pressures is possible with a SF6/O2 plasma, leading to round or steep sidewalls of the grooves, respectively. Finally a completed bare structure containing a membrane and a surrounding decoupling zone is presented

Resonating silicon beam force sensor

A resonating silicon-beam force sensor is being deveoped using micro-machining of silicon and IC-compatible processes. Results are reported here of measurements on the force-to-frequency transfer of bare silicon prototypes. The measurements with forces on the sensor beam up to 0.4 N shows a frequency shift of 3.1 to 5.2 times the unloaded resonance frequency f0(f0 congruent with 3 to 5 kHz), depending on the exact dimensions. Considering these figures, we can predict a frequency shift of 18.3 to 27.6 kHz at the maximum load of 1.0 N for the measured samples. Due to the sample lay-out, a force transfer is present from the externally applied force to the actual pulling force on the sensor beam. Using a simple model to calculate this reduction, we obtain good agreement between the measurements and predictions

Membranes fabricated with a deep single corrugation for package stress reduction and residual stress relief

Thin square membranes including a deep circular corrugation are realized and tested for application in a strain-based pressure sensor. Package-induced stresses are reduced and relief of the residual stress is obtained, resulting in a large pressure sensitivity and a reduced temperature sensitivity. Finite element method simulations were carried out, showing that the pressure-deflection behaviour of the structure is close to that of a circular membrane with clamped edge but free radial motion

A piezoelectric micropump based on micromachining of silicon

The design and realization of two pumps based on micromachining of silicon are described. The pumps, which are of the reciprocating displacement type, comprise one or two pump chambers, a thin glass pump membrane actuated by a piezoelectric disc and passive silicon check valves to direct the flow. Chambers, channels and valves are realized in a silicon wafer by wet chemical etching. The results of mechanical calculations and simulations show good agreement with the actual behaviour of the pumps. It is possible to design pumps having a specific yield and pressure dependence, and which are fail-safe (the flow is blocked while the pump is switched off)

Excitation and detection of vibrations of micromechanical structures using a dielectric thin film

A new technique is introduced for both the excitation and the detection of vibrations of micromechanical structures. This makes use of a dielectric thin film, sandwiched between lower and upper electrodes, on top of the vibrating structure. The excitation is based on electrostatic forces between the charged electrodes, causing deformation of the dielectric film and bending of the multilayer structure. The detection of the vibration is capacitive, based on the fluctuation of the capacitance due to the deformation of the dielectric film. Experimental results for a stoichiometric silicon nitride dielectric film on top of a silicon cantilever agree well with predicted values. The yield of the electrostatic excitation as well as of the capacitive detection are satisfactory

Phase Behavior of Stratum Corneum Lipid Mixtures Based on Human Ceramides: The Role of Natural and Synthetic Ceramide 1

In a recent study the lipid phase behavior of mixtures of human ceramides, cholesterol, and free fatty acids has been examined. We observed in cholesterol: human ceramide mixtures a prominent formation of the 12.8 nm lamellar phase (referred to as the long periodicity phase). Addition of free fatty acids promoted the formation of a 5.6 nm lamellar phase (referred to as the short periodicity phase) and increased the subpopulation of lipids forming a fluid phase. In this study we focused on the role of human ceramide 1, as the presence of this ceramide appeared to be crucial for proper lipid phase behavior in mixtures prepared with ceramide isolated from pig stratum corneum. In order to do this, mixtures of cholesterol and free fatty acids were prepared with human ceramides, in which natural human ceramide 1 was replaced by either synthetic CER1-linoleate (CER1-lin), or CER1-oleate (CER1-ol), or CER1-stearate (CER1-ste). After substitution of natural human ceramide 1 by synthetic ceramide 1 the following observations were made. (i) In the presence of synthetic CER1-ste no long periodicity phase and no liquid phase could be detected. (ii) In the presence of HCER1-ol a liquid phase was more prominently formed than in the presence of HCER1-lin. (iii) In cholesterol:human ceramide mixtures in the presence of CER1-lin the long periodicity phase was more prominently present than in the presence of CER1-ol. (iv) In the presence of CER1-ste neither a long periodicity phase nor a liquid lateral packing could be detected. The results of these studies further indicate that for the formation of the long periodicity phase a certain (optimal) fraction of lipids has to form a liquid phase. When the fraction forming this liquid phase is either too low or too high, the formation of the short periodicity phase is increased at the expense of the formation of the long periodicity phase. Based on the results of this and previous studies we offer an explanation for the deviation in lipid organization in diseased and in dry skin compared to normal skin

Hyaluronic acid-recombinant gelatin gels as a scaffold for soft tissue regeneration

An array of different types of hyaluronic acid (HA)- and collagen-based products is available for filling soft-tissue defects. A major drawback of the current soft-tissue fillers is their inability to induce cell infiltration and new tissue formation. Our aim is to develop novel biodegradable injectable gels which induce soft tissue regeneration, initially resulting in integration and finally replacement of the gel with new autologous tissue. Two reference gels of pure HA, monophasic HA-1 and micronised HA-2, were used. Furthermore, both gels were mixed with recombinant gelatin (RG) resulting in HA-1+RG and HA-2+RG. All gels were subcutaneously injected on the back of rats and explanted after 4 weeks. Addition of RG to HA-1 resulted in stroma formation (neovascularisation and ECM deposition) which was restricted to the outer rim of the HA-1+RG gel. In contrast, addition of RG to HA-2 induced stroma formation throughout the gel. The RG component of the gel was degraded by macrophages and giant cells and subsequently replaced by new vascularised tissue. Immunohistochemical staining showed that the extracellular matrix components collagen I and III were deposited throughout the gel. In conclusion, this study shows the proof of principle that addition of RG to HA-2 results in a novel injectable gel capable of inducing soft tissue regeneration. In this gel HA has a scaffold function whereas the RG component induces new tissue formation, resulting in proper vascularisation and integration of the HA-2+RG gel with the autologous tissue