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2 research outputs found
Formation and structural characterization of nanocrystalline Si/SiC multilayers grown by hot filament assisted chemical vapor deposition using CH3SiH3 gas jets
Author
Arita Makoto
Ikoma Yoshifumi
+3 more
Motooka Teruaki
Okuyama Ryousuke
生駒 嘉史
Publication venue
Elsevier
Publication date
03/05/2010
Field of study
No full text
Kyushu University Institutional Repository
Gettering Technology for CMOS Image Sensors Using a Cluster Ion Implantation
Author
Ayumi MASADA
Hidehiko OKUDA
+5 more
Kazunari KURITA
KOGA Yoshihiko
Ryo HIROSE
Ryousuke OKUYAMA
Takeshi KADONO
Publication venue
'Surface Science Society Japan'
Publication date
01/01/2016
Field of study
No full text
Crossref