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In Vacuo Photoemission Studies of Platinum Atomic Layer Deposition Using Synchrotron Radiation
The mechanism of platinum atomic layer deposition using
(methylcyclopentadienyl)trimethylplatinum
and oxygen is investigated with in vacuo photoemission spectroscopy
at the Stanford Synchrotron Radiation Lightsource. With this surface-sensitive
technique, the surface species following the Pt precursor half cycle
and the oxygen counter-reactant half cycle can be directly measured.
We observed significant amounts of carbonaceous species following
the Pt precursor pulse, consistent with dehydrogenation of the precursor
ligands. Significantly more carbon is observed when deposition is
carried out in the thermal decomposition temperature region. The carbonaceous
layer is removed during the oxygen counter reactant pulse, and the
photoemission spectrum shows that a layer of adsorbed oxygen remains
on the surface as previously predicted