16 research outputs found
Deprotection kinetic monitoring of a 193 nm positive tone resist by ellipsometry
International audienc
Deprotection kinetic monitoring of a 193nm resist by ellipsometry
International audienc
Ellipsometry studies of the kinetic of deprotection of thin 193 nm positive tone resist film
International audienc
Deprotection kinetic monitoring of a 193 nm positive tone resist by ellipsometry
International audienc
Low-k epoxy silsesquioxane resist for UV nanoimprint lithography
International audienc
Photopolymerisation kinetic study of UV-NIL dedicated resists
International audienc