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    16 research outputs found

    Si-to-Si wafer bonding using evaporated glass

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    'Institute of Electrical and Electronics Engineers (IEEE)'
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    Online Research Database In Technology

    Aggressive media exposed differential pressure sensor with a deposited membrane

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    'Institute of Electrical and Electronics Engineers (IEEE)'
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    A mechanical impact of coatings on membranes

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    'Institute of Electrical and Electronics Engineers (IEEE)'
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    Diffusion Barriers in Magnetic, Electrical, and Optical Properties of Intermetallic Compounds

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    John Wiley & Sons Ltd
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    Residual stress in thin-film anodic bonding

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    'IOP Publishing'
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    Fabrication and characterization of a piezoelectric accelerometer

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    'IOP Publishing'
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    Silicon-to-silicon wafer bonding using evaporated glass

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    'Elsevier BV'
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    Improved quality of zinc-oxide thin-films by in-situ annealing

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    Strength and leak testing of plasma activated bonded interfaces

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    Sodium distribution in thin-film anodic bonding

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