Probing the loss origins of ultra-smooth Si3N4\mathrm{Si_3N_4} integrated photonic waveguides

On-chip optical waveguides with low propagation losses and precisely engineered group velocity dispersion (GVD) are important to nonlinear photonic devices such as soliton microcombs. Yet, despite intensive research efforts, nonlinear integrated photonic platforms still feature propagation losses orders of magnitude higher than in standard optical fiber. The tight confinement and high index contrast of integrated waveguides make them highly susceptible to fabrication induced surface roughness. Therefore, microresonators with ultra-high Q factors are, to date, only attainable in polished bulk crystalline, or chemically etched silica based devices, that pose however challenges for full photonic integration. Here, we demonstrate the fabrication of silicon nitride ($\mathrm{Si_3N_4}$) waveguides with unprecedentedly smooth sidewalls and tight confinement with record low propagation losses. This is achieved by combining the photonic Damascene process with a novel reflow process, which reduces etching roughness, while sufficiently preserving dimensional accuracy. This leads to previously unattainable \emph{mean} microresonator Q factors larger than $5\times10^6$ for tightly confining waveguides with anomalous dispersion. Via systematic process step variation and two independent characterization techniques we differentiate the scattering and absorption loss contributions, and reveal metal impurity related absorption to be an important loss origin. Although such impurities are known to limit optical fibers, this is the first time they are identified, and play a tangible role, in absorption of integrated microresonators. Taken together, our work provides new insights in the origins of propagation losses in $\mathrm{Si_3N_4}$ waveguides and provides the technological basis for integrated nonlinear photonics in the ultra-high Q regime

Nanophotonic soliton-based microwave synthesizers

Microwave photonic technologies, which upshift the carrier into the optical domain to facilitate the generation and processing of ultrawide-band electronic signals at vastly reduced fractional bandwidths, have the potential to achieve superior performance compared to conventional electronics for targeted functions. For microwave photonic applications such as filters, coherent radars, subnoise detection, optical communications and low-noise microwave generation, frequency combs are key building blocks. By virtue of soliton microcombs, frequency combs can now be built using CMOS compatible photonic integrated circuits, operated with low power and noise, and have already been employed in system-level demonstrations. Yet, currently developed photonic integrated microcombs all operate with repetition rates significantly beyond those that conventional electronics can detect and process, compounding their use in microwave photonics. Here we demonstrate integrated soliton microcombs operating in two widely employed microwave bands, X- and K-band. These devices can produce more than 300 comb lines within the 3-dB-bandwidth, and generate microwave signals featuring phase noise levels below 105 dBc/Hz (140 dBc/Hz) at 10 kHz (1 MHz) offset frequency, comparable to modern electronic microwave synthesizers. In addition, the soliton pulse stream can be injection-locked to a microwave signal, enabling actuator-free repetition rate stabilization, tuning and microwave spectral purification, at power levels compatible with silicon-based lasers (<150 mW). Our results establish photonic integrated soliton microcombs as viable integrated low-noise microwave synthesizers. Further, the low repetition rates are critical for future dense WDM channel generation schemes, and can significantly reduce the system complexity of photonic integrated frequency synthesizers and atomic clocks

Entanglement swapping between independent and asynchronous integrated photon-pair sources

Integrated photonics represents a technology that could greatly improve quantum communication networks in terms of cost, size, scaling, and robustness. A key benchmark for this is to demonstrate their performance in complex quantum networking protocols, such as entanglement swapping between independent photon-pair sources. Here, using time-resolved detection, and two independent and integrated Si$_3$N$_4$ microring resonator photon-pair sources, operating in the CW regime at telecom wavelengths, we obtained spectral purities up to $0.97 \pm 0.02$ and a HOM interference visibility between the two sources of $V_{\rm HOM}=93.2 \pm 1.6\,\%$. This results in entanglement swapping visibility as high as $91.2 \pm 3.4\,\%

High-yield wafer-scale fabrication of ultralow-loss, dispersion-engineered silicon nitride photonic circuits

Low-loss photonic integrated circuits (PIC) and microresonators have enabled novel applications ranging from narrow-linewidth lasers, microwave photonics, to chip-scale optical frequency combs and quantum frequency conversion. To translate these results into a widespread technology, attaining ultralow optical losses with established foundry manufacturing is critical. Recent advances in fabrication of integrated Si3N4 photonics have shown that ultralow-loss, dispersion-engineered microresonators can be attained at die-level throughput. For emerging nonlinear applications such as integrated travelling-wave parametric amplifiers and mode-locked lasers, PICs of length scales of up to a meter are required, placing stringent demands on yield and performance that have not been met with current fabrication techniques. Here we overcome these challenges and demonstrate a fabrication technology which meets all these requirements on wafer-level yield, performance and length scale. Photonic microresonators with a mean Q factor exceeding 30 million, corresponding to a linear propagation loss of 1.0 dB/m, are obtained over full 4-inch wafers, as determined from a statistical analysis of tens of thousands of optical resonances and cavity ringdown with 19 ns photon storage time. The process operates over large areas with high yield, enabling 1-meter-long spiral waveguides with 2.4 dB/m loss in dies of only 5x5 mm size. Using a modulation response measurement self-calibrated via the Kerr nonlinearity, we reveal that, strikingly, the intrinsic absorption-limited Q factor of our Si3N4 microresonators exceeds a billion. Transferring the present Si3N4 photonics technology to standard commercial foundries, and merging it with silicon photonics using heterogeneous integration technology, will significantly expand the scope of today's integrated photonics and seed new applications

Free-electron interaction with nonlinear optical states in microresonators

The short de Broglie wavelength and strong interaction empower free electrons to probe scattering and excitations in materials and resolve the structure of biomolecules. Recent advances in using nanophotonic structures to mediate bilinear electron-photon interaction have brought novel optical manipulation schemes to electron beams, enabling high space-time-energy resolution electron microscopy, quantum-coherent optical modulation, attosecond metrology and pulse generation, transverse electron wavefront shaping, dielectric laser acceleration, and electron-photon pair generation. However, photonic nanostructures also exhibit nonlinearities, which have to date not been exploited for electron-photon interactions. Here, we report the interaction of electrons with spontaneously generated Kerr nonlinear optical states inside a continuous-wave driven photonic chip-based microresonator. Optical parametric processes give rise to spatiotemporal pattern formation, or dissipative structures, corresponding to coherent or incoherent optical frequency combs. By coupling such microcombs in situ to electron beams, we demonstrate that different dissipative structures induce distinct fingerprints in the electron spectra and Ramsey-type interference patterns. In particular, using spontaneously formed femtosecond temporal solitons, we achieve ultrafast temporal gating of the electron beam without the necessity of a pulsed laser source or a pulsed electron source. Our work elucidates the interaction of free electrons with a variety of nonlinear dissipative states, demonstrates the ability to access solitons inside an electron microscope, and extends the use of microcombs to unexplored territories, with ramifications in novel ultrafast electron microscopy, light-matter interactions driven by on-chip temporal solitons, and ultra-high spatiotemporal resolution sampling of nonlinear optical dynamics and devices