RISE: robust iterative surface extension for sub-nanometer X-ray mirror fabrication

Precision optics have been widely required in many advanced technological applications. X-ray mirrors, as an example, serve as the key optical components at synchrotron radiation and free electron laser facilities. They are rectangular silicon or glass substrates where a rectangular Clear Aperture (CA) needs to be polished to sub-nanometer Root Mean Squared (RMS) to keep the imaging capability of the incoming X-ray wavefront at the diffraction limit. The convolutional polishing model requires a CA to be extended with extra data, from which the dwell time is calculated via deconvolution. However, since deconvolution is very sensitive to boundary errors and noise, the existing surface extension methods can hardly fulfill the sub-nanometer requirement. On one hand, the figure errors in a CA were improperly modeled during the extension, leading to continuity issues along the boundary. On the other hand, uncorrectable high-frequency errors and noise were also extended. In this study, we propose a novel Robust Iterative Surface Extension (RISE) method that resolves these problems with a data fitting strategy. RISE models the figure errors in a CA with orthogonal polynomials and ensures that only correctable errors are fit and extended. Combined with boundary conditions, an iterative refinement of dwell time is then proposed to compensate the errors brought by the extension and deconvolution, which drastically reduces the estimated figure error residuals in a CA while the increase of total dwell time is negligible. To our best knowledge, RISE is the first data fitting-based surface extension method and is the first to optimize dwell time based on iterative extension. An experimental verification of RISE is given by fabricating two elliptic cylinders (10 mm × 80 mm CAs) starting from a sphere with a radius of curvature around 173 m using ion beam figuring. The figure errors in the two CAs greatly improved from 204.96 nm RMS and 190.28 nm RMS to 0.62 nm RMS and 0.71 nm RMS, respectively, which proves that RISE is an effective method for sub-nanometer level X-ray mirror fabrication. © 2021 Optical Society of America under the terms of the OSA Open Access Publishing AgreementOpen access journalThis item from the UA Faculty Publications collection is made available by the University of Arizona with support from the University of Arizona Libraries. If you have questions, please contact us at [email protected]

Universal dwell time optimization for deterministic optics fabrication

202208 bcwwVersion of RecordOthersBrookhaven National Laboratory (BNL LDRD 17-016); Office of Science (DE-SC0012704)Publishe

Two-dimensional fringe projection for three-dimensional shape measurements by using the CWT phase gradient method

This paper describes an optical measurement technique for the two-dimensional fringe pattern (by introducing the carrier frequencies in two spatial directions x and y) by the continuous wavelet transform (CWT) phase gradient method. Such transforms based on the Morlet and Paul wavelets have been applied to image rows and columns one by one and then added to find the final phase distribution, without using any unwrapping algorithms. This technique is compared with the S-transform phase gradient method. Numerical simulations and actual experiments are carried out to show the validity of this technique for finding the phase distributions.Namik Kemal University Scientific Research Unit ProjectThis work was partially supported by the Namik Kemal University Scientific Research Unit Project (Profile Measurement of Objects by using 2D Continuous Wavelet Transform