2 research outputs found
Investigation on process induced nano scale shape deviations of DUV tungsten wire grid polarizer
Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range
Wire grid polarizers (WGPs), periodic nano-optical meta-surfaces, are
convenient polarizing elements for many optical applications. However, they are
still inadequate in the deep ultraviolet spectral range. We show that to
achieve high performance ultraviolet WGPs a material with large absolute value
of the complex permittivity and extinction coefficient at the wavelength of
interest has to be utilized. This requirement is compared to refractive index
models considering intraband and interband absorption processes. We elucidate
why the extinction ratio of metallic WGPs intrinsically humble in the deep
ultraviolet, whereas wide bandgap semiconductors are superior material
candidates in this spectral range. To demonstrate this, we present the design,
fabrication and optical characterization of a titanium dioxide WGP. At a
wavelength of 193 nm an unprecedented extinction ratio of 384 and a
transmittance of 10 % is achieved.Comment: 21 pages, Advanced Optical Materials 201