193nm immersion lithography studies with a double grating high NA achromatic interferometer

As immersion lithography will be the lithography technique for sub-65nm generation device fabrication, benefits and drawbacks of the introduction of an immersion fluid between the imaging optics and the wafer have to be studied. In this context, it is of high interest to be able to understand the properties of hyper high NA imaging and to do so, to have access to a technique which can mimic an industrial immersion stepper by having the possibility to tune the polarization state and numerical aperture. Interferometric lithography has proven to be a useful method to study projection imaging at high numerical aperture (NA). It has been shown to help addressing several issues of immersion lithography such as polarization state impact on imaging, photoresists material screening as well as preliminary defectivity considerations due to the introduction of water and high index fluid studies [1, 2, 3]. In the frame of this work, a home-built interferometer with immersion lithography capabilities has been fully designed and mounted in our facilities. Specific designs have been made in order to reach NAs as high as 1.4. All issues preventing the printing of high-contrasted lines over a large area, such as laser beam uniformity and vibrations control have been addressed and 40-nm-half-pitch resist lines can be currently printed with water immersion lithography. As a result, the interferometer has been used to screen resist and topcoat candidates for immersion lithography before their introduction in a production environment. An overview of our results is presented, focusing on the topcoat/resist compatibility. Besides, in order to prepare hyper NA lithography, We have implemented a simulation model which can be used to predict the light distribution inside a photolithographic stack. This model enables us to predict the resist image created by the interference of two coherent beams in the photo-resist volume. Simulations of polarization effects at oblique angles will be presented as well as the evaluation of image contrast in both TE and TM polarization. The contrast in TM polarization is dropping with increasing NA. Finally, we validate those predictions by experiments on our interferometer

Techno-economic assessment of solar energy coupling with large-scale desalination plant: The case of Morocco

International audienceThis paper examines the cost competitiveness of an extra-large-scale (275,000 m(3)/d) solar-powered desalination, taking as a case study the Chtouka Ait Baha plant in Morocco. It assesses the conditions at which solar Photovoltaics (PV) and Concentrated Solar Power (CSP) would be competitive with a grid (mainly fossil) driven desalination plant for the reference year and by 2030. The paper considers also a scenario where battery storage complements PV power generation. To conduct the analysis, a simple model of water cost calculation is built. Second, the cost related to energy consumption is calculated for different power supply options to evaluate the impact of energy provision cost on the final cost of water. The first main result of this paper is that desalinated water can be obtained at an acceptable cost of around 1 $/m(3). The second one is that PV without storage remains the cheapest power supply option today and by 2030. Storage based solution appears less competitive today but can be more attractive in a framework of increasing electricity grid prices and higher flexibility requirements in the future. The paper gives recommendations regarding the implication of different technology choices in the framework of the future Moroccan energy system

Techno-economic assessment of solar energy coupling with large-scale desalination plant: The case of Morocco

International audienceThis paper examines the cost competitiveness of an extra-large-scale (275,000 m(3)/d) solar-powered desalination, taking as a case study the Chtouka Ait Baha plant in Morocco. It assesses the conditions at which solar Photovoltaics (PV) and Concentrated Solar Power (CSP) would be competitive with a grid (mainly fossil) driven desalination plant for the reference year and by 2030. The paper considers also a scenario where battery storage complements PV power generation. To conduct the analysis, a simple model of water cost calculation is built. Second, the cost related to energy consumption is calculated for different power supply options to evaluate the impact of energy provision cost on the final cost of water. The first main result of this paper is that desalinated water can be obtained at an acceptable cost of around 1 $/m(3). The second one is that PV without storage remains the cheapest power supply option today and by 2030. Storage based solution appears less competitive today but can be more attractive in a framework of increasing electricity grid prices and higher flexibility requirements in the future. The paper gives recommendations regarding the implication of different technology choices in the framework of the future Moroccan energy system

Modélisation d’une installation de dessalement d’eau de mer par distillation soumise à des régimes transitoires

International audienc

Echangeurs de chaleur - Intensification des échanges thermiques

International audienceHeat Transfer Enhancement has overcome the laboratory field for several years, and is widely spread in industrial applications. Many heat exchangers in various processes are now equipped with plates or tubes especially designed to increase the heat transfer coefficients, which exhibit high operational values well above those obtained with flat surfaces.Le domaine de l'intensification des échanges de chaleur a depuis de nombreuses années dépassé le stade du laboratoire et largement été pris en compte dans les applications industrielles. Nombre d'échangeurs dans des procédés très divers sont équipés de surfaces d'échange (tubes ou plaques) spécialement conçues pour présenter des coefficients d'échange de chaleur élevés et notablement supérieurs à ceux des surfaces d'échange lisses

Plastic heat exchangers

Plastic properties may be used in the manufacturing of heat exchangers. Considering their advantages, their field of application is quite large low temperature heat recovery, concentration of solutions. Three equipment are described: a liquid-liquid shell and tube exchanger, a gas- gas shell exchanger and a falling flow evaporator

SOLMED: heat transfer characterization

International audienc

Dynamic modelling and analysis of the coupling MED-CSP

International audienc

Echangeurs de chaleur - Description

International audienceMain industrial technologies to manufacture heat exchanger are described. Various criteria of classification are presented: by technology, by process or heat transfer mode, by application, by wall material. A table gives the main types of heat exchangers according to these criteria. The most used kinds of heat exchangers are detailed (Shell and tube, Plate, etc.) by specifying the applications for which they are the best suited.Cet article décrit les principales technologies industrielles aboutissant à la réalisation d'un échangeur de chaleur. Les divers critères de classement des échangeurs sont technologiques, par procédé et mode de transfert de chaleur, par fonction ou par matériau constituant les parois. Un tableau donne les principaux types d'échangeurs en fonction de ces critères. Les types d'échangeurs les plus utilisés (à tubes, à plaques, etc.) sont détaillés en précisant les applications pour lesquelles ils sont les mieux adaptés