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2 research outputs found
Micro Four-Point Probe with High Spatial Resolution for Ion Implantation and Ultra-Shallow Junction Characterization
Author
Eddy Ronald
Egelhoff William F.
+6Â more
Kjær Daniel
Kopalidis Petros M.
Lin Rong
Petersen Dirch Hjorth
Pickert Larry
Walker David A.
Publication venue
'AIP Publishing'
Publication date
01/01/2008
Field of study
No full text
Online Research Database In Technology
Micro Four-Point Probe with High Spatial Resolution for Ion Implantation and Ultra-Shallow Junction Characterization
Author
Amitabh Jain
Daniel Kjaer
+10Â more
David A. Walker
Dirch Hjorth Petersen
Edmund G. Seebauer
Larry Pickert
Petros M. Kopalidis
Ronald Eddy
Rong Lin
Susan B. Felch
William F. Egelhoff
Yevgeniy V. Kondratenko
Publication venue
'AIP Publishing'
Publication date
01/01/2008
Field of study
Full text link
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