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Micro Four-Point Probe with High Spatial Resolution for Ion Implantation and Ultra-Shallow Junction Characterization
Authors
Amitabh Jain
Daniel Kjaer
+10Â more
David A. Walker
Dirch Hjorth Petersen
Edmund G. Seebauer
Larry Pickert
Petros M. Kopalidis
Ronald Eddy
Rong Lin
Susan B. Felch
William F. Egelhoff
Yevgeniy V. Kondratenko
Publication date
1 January 2008
Publisher
'AIP Publishing'
Doi
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Abstract
Abstract is not available.
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