MEMS-Based Terahertz Photoacoustic Chemical Sensing System

Advancements in microelectromechanical system (MEMS) technology over the last several decades has been a driving force behind miniaturizing and improving sensor designs. In this work, a specialized cantilever pressure sensor was designed, modeled, and fabricated to investigate the photoacoustic (PA) response of gases to terahertz (THz) radiation under low-vacuum conditions associated with high-resolution spectroscopy. Microfabricated cantilever devices made using silicon-on-insulator (SOI) wafers were tested in a custom-built test chamber in this first ever demonstration of a cantilever-based PA chemical sensor and spectroscopy system in the THz frequency regime. The THz radiation source was amplitude modulated to excite acoustic waves in the chamber, and PA molecular spectroscopy of a gas species was performed. An optical measurement technique was used to evaluate the PA effect on the cantilever sensor; a laser beam was reflected off the cantilever tip and through an iris to a photodiode. As the cantilever movement deflected the laser beam, the beam was clipped by an iris and generated the PA signal. Experimental data indicated a predominantly linear response in signal amplitude from the photodiode measurement technique, which directly correlated to measured cantilever deflections. Using the custom-designed PA chamber and MEMS cantilever sensor, excellent low-pressure PA spectral data of methyl cyanide (CH3CN) at 2 to 40 mTorr range has been obtained. At low chamber pressures, the sensitivity of our system was 1.97 × 10−5 cm−1 and had an excellent normalized noise equivalent absorption (NNEA) coefficient of 1.39 × 10−9 cm−1 W Hz-½ using a 0.5 s signal averaging time

Terahertz Photoacoustic Spectroscopy Using an MEMS Cantilever Sensor

In this paper, a microelectromechanical systems cantilever sensor was designed, modeled, and fabricated to measure the photoacoustic (PA) response of gases under very low vacuum conditions. The micromachined devices were fabricated using silicon-on-insulator wafers and then tested in a custom-built, miniature, vacuum chamber during this first-ever demonstration. Terahertz radiation was amplitude modulated to excite the gas under test and perform PA molecular spectroscopy. Experimental data show a predominantly linear response that directly correlates measured cantilever deflection to PA signals. Excellent low pressure (i.e., 2-40 mTorr) methyl cyanide PA spectral data were collected resulting in a system sensitivity of 1.97 × 10 -5 cm -1 and a normalized noise equivalent absorption coefficient of 1.39 × 10 -9 cm -1 W Hz -1/2

MEMS-Based Terahertz Photoacoustic Chemical Sensing System

Advancements in microelectromechanical system (MEMS) technology over the last several decades has been a driving force behind miniaturizing and improving sensor designs. In this work, a specialized cantilever pressure sensor was designed, modeled, and fabricated to investigate the photoacoustic (PA) response of gases to terahertz (THz) radiation under low-vacuum conditions associated with high-resolution spectroscopy. Microfabricated cantilever devices made using silicon-on-insulator (SOI) wafers were tested in a custom-built test chamber in this first ever demonstration of a cantilever-based PA chemical sensor and spectroscopy system in the THz frequency regime. The THz radiation source was amplitude modulated to excite acoustic waves in the chamber, and PA molecular spectroscopy of a gas species was performed. An optical measurement technique was used to evaluate the PA effect on the cantilever sensor; a laser beam was reflected off the cantilever tip and through an iris to a photodiode. As the cantilever movement deflected the laser beam, the beam was clipped by an iris and generated the PA signal. Experimental data indicated a predominantly linear response in signal amplitude from the photodiode measurement technique, which directly correlated to measured cantilever deflections. Using the custom-designed PA chamber and MEMS cantilever sensor, excellent low-pressure PA spectral data of methyl cyanide (CH3CN) at 2 to 40 mTorr range has been obtained. At low chamber pressures, the sensitivity of our system was 1.97 × 10−5 cm−1 and had an excellent normalized noise equivalent absorption (NNEA) coefficient of 1.39 × 10−9 cm−1 W Hz-½ using a 0.5 s signal averaging time

Fabrication of Microelectromechanical Systems (MEMS) Cantilevers for Photoacoustic (PA) Detection of Terahertz (THz) Radiation

Historically, spectroscopy has been a cumbersome endeavor due to the relatively large sizes (3ft – 100ft in length) of modern spectroscopy systems. Taking advantage of the photoacoustic effect would allow for much smaller absorption chambers since the photoacoustic (PA) effect is independent of the absorption path length. In order to detect the photoacoustic waves being generated, a photoacoustic microphone would be required. This paper reports on the fabrication efforts taken in order to create microelectromechanical systems (MEMS) cantilevers for the purpose of sensing photoacoustic waves generated via terahertz (THz) radiation passing through a gaseous sample. The cantilevers are first modeled through the use of the finite element modeling software, CoventorWare®. The cantilevers fabricated with bulk micromachining processes and are 7x2x0.010mm on a silicon-on-insulator (SOI) wafer which acts as the physical structure of the cantilever. The devices are released by etching through the wafer’s backside and etching through the buried oxide with hydrofluoric acid. The cantilevers are placed in a test chamber and their vibration and deflection are measured via a Michelson type interferometer that reflects a laser off a gold tip evaporated onto the tip of the cantilever. The test chamber is machined from stainless steel and housed in a THz testing environment at Wright State University. Fabricated devices have decreased residual stress and larger radii of curvatures by approximately 10X

A MEMS Photoacoustic Detector of Terahertz Radiation for Chemical Sensing

A piezoelectric Microelectromechanical system (MEMS) cantilever pressure sensor was designed, modeled, fabricated, and tested for sensing the photoacoustic response of gases to terahertz (THz) radiation. The sensing layers were comprised of three thin films; a lead zirconate titanate (PZT) piezoelectric layer sandwiched between two metal contact layers. The sensor materials were deposited on the silicon device layer of a silicon-on-insulator (SOI) wafer, which formed the physical structure of the cantilever. To release the cantilever, a hole was etched through the backside of the wafer and the buried oxide was removed with hydrofluoric acid. Devices were then tested in a custom made THz vacuum test chamber. Cantilever deflection was observed with a laser interferometer in the test chamber and preliminary data indicates the signals were caused by the photoacoustic effect. Future device data will also include the piezoelectric voltage signal analysis

Detection of interstellar hydrogen peroxide

The molecular species hydrogen peroxide, HOOH, is likely to be a key ingredient in the oxygen and water chemistry in the interstellar medium. Our aim with this investigation is to determine how abundant HOOH is in the cloud core {\rho} Oph A. By observing several transitions of HOOH in the (sub)millimeter regime we seek to identify the molecule and also to determine the excitation conditions through a multilevel excitation analysis. We have detected three spectral lines toward the SM1 position of {\rho} Oph A at velocity-corrected frequencies that coincide very closely with those measured from laboratory spectroscopy of HOOH. A fourth line was detected at the 4{\sigma} level. We also found through mapping observations that the HOOH emission extends (about 0.05 pc) over the densest part of the {\rho} Oph A cloud core. We derive an abundance of HOOH relative to that of H_2 in the SM1 core of about 1\times10^(-10). To our knowledge, this is the first reported detection of HOOH in the interstellar medium.Comment: 5 pages, 4 figures, accepted for publication in Astronomy & Astrophysics, new version corrects a typo in Table 1 (and consequently in Fig 4

A Fast Scan Submillimeter Spectroscopic Technique

A new fast scan submillimeter spectroscopic technique (FASSST) has been developed which uses a voltage tunable backward wave oscillator (BWO) as a primary source of radiation, but which uses fast scan (~105 Doppler limited resolution elements/s) and optical calibration methods rather than the more traditional phase or frequency lock techniques. Among its attributes are (1) absolute frequency calibration to ~1/10 of a Doppler limited gaseous absorption linewidth (\u3c0.1 MHz, 0.000 003 cm-1), (2) high sensitivity, and (3) the ability to measure many thousands of lines/s. Key elements which make this system possible include the excellent short term spectral purity of the broadly (~100 GHz) tunable BWO; a very low noise, rapidly scannable high voltage power supply; fast data acquisition; and software capable of automated calibration and spectral line measurement. In addition to the unique spectroscopic power of the FASSST system, its implementation is simple enough that it has the prospect of impacting a wide range of scientific problems

The 2009 edition of the GEISA spectroscopic database

The updated 2009 edition of the spectroscopic database GEISA (Gestionet Etudedes Informations Spectroscopiques Atmospheriques ; Management and Study of Atmospheric Spectroscopic Information) is described in this paper. GEISA is a computer-accessible system comprising three independent sub-databases devoted, respectively, to: line parameters, infrared and ultraviolet/visible absorption cross-sections, microphysical and optical properties of atmospheric aerosols. In this edition, 50 molecules are involved in the line parameters sub-database, including 111 isotopologues, for a total of 3,807,997 entries, in the spectral range from 10-6 to 35,877.031cm-1. GEISA, continuously developed and maintained at LMD (Laboratoirede Meteorologie Dynamique, France) since 1976, is implemented on the IPSL/CNRS(France) ‘‘Ether’’ Products and Services Centre WEB site (http://ether.ipsl.jussieu.fr), where all archived spectroscopic data can be handled through general and user friendly associated managements of software facilities. More than 350 researchers are registered for online use of GEISA

STEM Education Research: Grading Practices and Equity

This research study focused on grading methods, more specifically Un-grading which can be implemented in a variety of ways. Students and instructors from three different courses utilizing this method were interviewed and the results of the benefits and drawbacks are highlighted in this paper. This study offers suggestions for improving the current 0-100 grading scale utilized in most education communities and elements of traditional grading that could be applied to Un-grading. The results of this study suggest Un-grading has a variety of benefits over traditional grading scales but has improvements to be implemented to increase the effectiveness

Teaching Practicum in Physics

My student teaching in 2021 began in the midst of the COVID 19 virus, which was a very unique scenario to complete my practicum. I delivered lessons both online and in-person which required me to create lesson plans could be taught virtually or hybrid. A majority of my time was spent refining these lesson plans to the point I felt comfortable teaching. In order to obtain my Massachusetts teaching license, I followed the Candidate Assessment of Performance (CAP) cycle. Some aspects of the program included demonstrating my skills in six key areas which were, content knowledge, reflective practice, safe learning environment, meeting diverse needs, well-structured lessons, and High Expectations. I was required to meet at least the needs improvement evaluation in all of these sections but generally scored as Proficient. Through this experience I had a Supervising Practitioner, Thomas Noviello, who was in charge of assessing my teaching ability. He also collaborated with my Mentor Teacher Jackie Kalisz to evaluate if I was ready to obtain my teaching license. To detail my student teaching experience, I created an online e-portfolio to display information about Worcester Tech and the students, but also lesson plans and how I adhered to each of these CAP Elements. Below is a link to my e-portfolio website: https://sites.google.com/view/petkieteachingpracticum/appendicies?authuser=