58 research outputs found
Impact of Post Via Clean Solution on Self Aligned Barrier Integrity: Corrosion and Cu/Co Galvanic Coupling
Study of the post-etch cleaning compatibility with dense and porous ULK materials – characterization of the process impact
International audienc
Crosslinking impact of mesoporous MSQ films used in microelectronic interconnections on mechanical properties
A Study of Plasma Treatments Limiting Metal Barrier Diffusion into Porous Low-k Materials
- …