9 research outputs found
Optimization strategy for actuator and sensor placement in active structural acoustic control
Transient non-linear response of 'pull-in MEMS devices' including squeeze film effects
The dynamic behaviour of “pull-in MEMS devices” including a squeeze film is described by non-linear differential equations that are solved numerically. The pull-in time of a basic parallel plate structure as a function of the ambient pressure, external driving force and plate length/width ratio has been simulated for single- and double-gap configurations. It has been found that the pull-in time can be greatly reduced by lowering the ambient pressure and/or by increasing the driving force. The model has been applied to predict the operate time of an electromagnetic microrelay. Measurements and simulations show good agreement