8 research outputs found

    Dual field alignment display and control for electron micropattern generator

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    Application of electron beam lithography to replace photolithography process in fabrication of integrated circuits is discussed. Procedure for using electron beam lithography equipment is described. Diagram of electron micropattern generator is provided

    Lithography

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    Metadata record for: HIT-COVID, a global database tracking public health interventions to COVID-19

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    This dataset contains key characteristics about the data described in the Data Descriptor HIT-COVID, a global database tracking public health interventions to COVID-19. Contents: 1. human readable metadata summary table in CSV format 2. machine readable metadata file in JSON forma
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