3 research outputs found
Metal-Organic Framework ZIF‑8 Films As Low‑κ Dielectrics in Microelectronics
ZIF-8 films were deposited on silicon wafers and characterized
to assess their potential as future insulators (low-κ dielectrics)
in microelectronics. Scanning electron microscopy and gas adsorption
monitored by spectroscopic ellipsometry confirmed the good coalescence
of the crystals, the absence of intergranular voids, and the hydrophobicity
of the pores. Mechanical properties were assessed by nanoindentation
and tape tests, confirming sufficient rigidity for chip manufacturing
processes (elastic modulus >3 GPa) and the good adhesion to the
support.
The dielectric constant was measured by impedance analysis at different
frequencies and temperatures, indicating that κ was only 2.33
(±0.05) at 100 kHz, a result of low polarizability and density
in the films. Intensity voltage curves showed that the leakage current
was only 10<sup>–8</sup> A cm<sup>2</sup> at 1 MV cm<sup>–1</sup>, and the breakdown voltage was above 2 MV cm<sup>–1</sup>. In conclusion, metal-organic framework ZIF-8 films were experimentally
found to be promising candidates as low-κ dielectrics in microelectronic
chip devices. This opens a new direction for research into the application
of metal-organic frameworks
Nanoscale Noncontact Subsurface Investigations of Mechanical and Optical Properties of Nanoporous Low-<i>k</i> Material Thin Film
Revealing defects and inhomogeneities of physical and chemical properties beneath a surface or an interface with in-depth nanometric resolution plays a pivotal role for a high degree of reliability in nanomanufacturing processes and in materials science more generally., Nanoscale noncontact depth profiling of mechanical and optical properties of transparent sub-micrometric low-<i>k</i> material film exhibiting inhomogeneities is here achieved by picosecond acoustics interferometry. On the basis of the optical detection through the time-resolved Brillouin scattering of the propagation of a picosecond acoustic pulse, depth profiles of acoustical velocity and optical refractive index are measured simultaneously with spatial resolution of tens of nanometers. Furthermore, measuring the magnitude of this Brillouin signal provides an original method for depth profiling of photoelastic moduli. This development of a new opto-acoustical nanometrology paves the way for in-depth inspection and for subsurface nanoscale imaging of inorganic- and organic-based materials
Tuning the Pore Size of Ink-Bottle Mesopores by Atomic Layer Deposition
Tuning the Pore Size of
Ink-Bottle Mesopores by Atomic
Layer Depositio