Metal-Organic Framework ZIF‑8 Films As Low‑κ Dielectrics in Microelectronics

ZIF-8 films were deposited on silicon wafers and characterized to assess their potential as future insulators (low-κ dielectrics) in microelectronics. Scanning electron microscopy and gas adsorption monitored by spectroscopic ellipsometry confirmed the good coalescence of the crystals, the absence of intergranular voids, and the hydrophobicity of the pores. Mechanical properties were assessed by nanoindentation and tape tests, confirming sufficient rigidity for chip manufacturing processes (elastic modulus >3 GPa) and the good adhesion to the support. The dielectric constant was measured by impedance analysis at different frequencies and temperatures, indicating that κ was only 2.33 (±0.05) at 100 kHz, a result of low polarizability and density in the films. Intensity voltage curves showed that the leakage current was only 10^–8 A cm² at 1 MV cm^–1, and the breakdown voltage was above 2 MV cm^–1. In conclusion, metal-organic framework ZIF-8 films were experimentally found to be promising candidates as low-κ dielectrics in microelectronic chip devices. This opens a new direction for research into the application of metal-organic frameworks

Nanoscale Noncontact Subsurface Investigations of Mechanical and Optical Properties of Nanoporous Low-<i>k</i> Material Thin Film

Revealing defects and inhomogeneities of physical and chemical properties beneath a surface or an interface with in-depth nanometric resolution plays a pivotal role for a high degree of reliability in nanomanufacturing processes and in materials science more generally., Nanoscale noncontact depth profiling of mechanical and optical properties of transparent sub-micrometric low-<i>k</i> material film exhibiting inhomogeneities is here achieved by picosecond acoustics interferometry. On the basis of the optical detection through the time-resolved Brillouin scattering of the propagation of a picosecond acoustic pulse, depth profiles of acoustical velocity and optical refractive index are measured simultaneously with spatial resolution of tens of nanometers. Furthermore, measuring the magnitude of this Brillouin signal provides an original method for depth profiling of photoelastic moduli. This development of a new opto-acoustical nanometrology paves the way for in-depth inspection and for subsurface nanoscale imaging of inorganic- and organic-based materials

Tuning the Pore Size of Ink-Bottle Mesopores by Atomic Layer Deposition

Tuning the Pore Size of Ink-Bottle Mesopores by Atomic Layer Depositio