Thermal Metalorganic Chemical Vapor Deposition of Ti-Si-N Films for Diffusion Barrier Applications

Structurally disordered refractory ternary films such as titanium silicon nitride (Ti-Si-N) have potential as advanced diffusion barriers in future ULSI metallization schemes. Here the authors present results on purely thermal metalorganic chemical vapor deposition (CVD) of Ti-Si-N. At temperatures between 300 and 450 C, tetrakis(diethylamido)titanium (TDEAT), silane, and ammonia react to grow Ti-Si-N films with Si contents of 0--20 at.%. Typical impurity contents are 5--10 at.%H and 0.5 to 1.5 at.% C, with no O or other impurities detected in the bulk of the film. Although the film resistivity increases with increasing Si content, it remains below 1,000 {micro}{Omega}-cm for films with less than 5 at.% Si. These films are promising candidates for advanced diffusion barriers

Thermal metalorganic chemical vapor deposition of Ti-Si-N films for diffusion barrier applications

Structurally disordered refractory ternary films such as titanium silicon nitride (Ti-Si-N) have potential as advanced diffusion barriers in future ULSI metallization schemes. Here the authors present results on purely thermal metalorganic chemical vapor deposition (CVD) of Ti-Si-N. At temperatures between 300 and 450 C, tetrakis(diethylamido)titanium (TDEAT), silane, and ammonia react to grow Ti-Si-N films with Si contents of 0--20 at.%. Typical impurity contents are 5--10 at.%H and 0.5 to 1.5 at.% C, with no O or other impurities detected in the bulk of the film. Although the film resistivity increases with increasing Si content, it remains below 1,000 {micro}{Omega}-cm for films with less than 5 at.% Si. These films are promising candidates for advanced diffusion barriers

Crystal structure and luminescence of 2,7-dimethylnaphthalene-1-carbonitrile

The title compound crystallizes in the monoclinic space group P21/c: Mr = 181.2; a = 7.119(1), b = 18.389(4), c = 7.5385(6) Å; β = 91.661(7)o; V = 986.4(5) Å3; and Z = 4. The purified material shows fluorescence similar to other naphthalene derivatives: monomer fluorescence (λmax 350-370 nm) in the solid state and in dilute solutions, and excimer fluorescence (λmax 421 nm) in concentrated solutions. Intense blue-green luminescence (λmax, 490 nm) is observed in some partially purified crystalline samples. This is attributed to phosphorescence from two isomeric bromodimethylnaphthalenecarbonitrile impurities detected by GC-MS analysis

Electronic spectrum and crystal structure of fac-MoOCl\u3csub\u3e3\u3c/sub\u3e(dppe)

X-ray analysis of the oxomolybdenum(V) complex MoOCl3(dppe) (dppe = 1,2-bis(diphenylphosphino)ethane) shows that it is the facial isomer. (C26H24Cl1MoOP2, space group P21/n, a = 13.217(1), b = 12.8935(8), c = 16.0578(9) Å, β= 99.967(5)°, V = 2695.1(6) Å3, Z = 4, R = 0.038 for 6228 data with l \u3e 1σ(I).) The electronic absorption spectrum of the title compound is also compared with those of other oxomolybdenum(V) complexes. © 1998 Elsevier Science Ltd. All rights reserved

Structures of anhydrous and hydrated copper(II) hexafluoroacetylacetonate

Crystal structure analyses are reported for anhydrous copper(II) hexafluoroacetylacetonate (Cu(hfac)2) and for two of its hydrates. The anhydrous compound (Cu(hfac)2, 1: P1; at 100 K, a = 5.428(1), b = 5.849(1), c = 11.516(3) Å; α = 81.47(2), β = 74.57(2), γ = 86.96(2)°; Z = 1) contains centrosymmetric square-planar complexes with close intermolecular Cu···F contacts. The geometry of the complex is similar to that previously reported for Cu(hfac)2· toluene. The monoaquo compound (Cu(hfac)2(H2O), 2: P21/c; at 100 K, a = 10.8300(8), b = 6.5400(6), c = 21.551(3) Å; β = 90.282(8)°; Z = 4) consists of square-pyramidal molecules with apical H2O ligands, and close-lying F atoms in the sixth coordination sites. The major difference between this structure and the two other polymorphs previously reported is the nature and direction of hydrogen bonds. The yellow-green solid formed from Cu(hfac)2 with excess H2O is identified as the trihydrate. In crystalline form it is the previously unreported [trans-Cu(hfac)2-(H2O)2] ·H2O (3: P1; at 150 K, a = 8.3899(3), b = 9.6011(3), c = 11.4852(4) Å; α = 72.397(2), β = 79.161(2), γ = 87.843(2)°; Z = 2). There is no conclusive evidence in favor of any solid with the composition Cu(hfac)2· 2H2O

Electronic Absorption Spectra and Phosphorescence of Oxygen-Containing Molybdenum(IV) Complexes

Electronic absorption and emission spectra are reported for salts of two oxomolybdenum(IV) cations, [MoOCl-(CN-t-Bu)4]+ and [MoOCl(Ph2PCH2CH2PPh2) 2]+. and for the new Mo(IV) complex [trans-Mo(OCH3)2(CN-t-Bu)4]2+. All three ions show absorption bands (λmax.abs 550-570 nm; ∈ 45-120 M-1 cm-1) attributable to the 1A1[(dxy)2] → 1E[(dxy)1(dxz,yz)1] (C4v) transition, and the last two show weak shoulders in the 700-750 nm range due to the analogous spin-forbidden (1A1 → 3E) transition. Phosphorescence (λmax,em 850-960 nm) occurs in the solid state for all three compounds at both room temperature and 77 K, and for [MoOCl(CN-t-Bu)4]+ in CH2Cl2 at room temperature. These are the first phosphorescences recorded for molybdenum(IV) complexes. [MoOCl-(CN-t-Bu)4](BPh4) precipitates quickly if NaBPh4 is added to the Mo(IV) solution prepared from MoCl5 and tert-butyl isocyanide in CH3OH. However, if NaPF6 is used instead, [trans-Mo(OCH3)2(CN-t-Bu)4](PF 6)2 (formed by reaction of [MoOCl(CN-t-Bu)4]+ with methanol) crystallizes over a period of ca. 24 h. The crystal structure of [trans-Mo(OCH3)2(CN-t-Bu)4](PF 6)2 has been determined: C22H42F12MoN4O2P 2, monoclinic; space group P21/ c; a = 9.1538(8) Å, b = 15.709(2) Å, c = 13.456(2) Å; β= 103.31(1)°; Z = 2; R(F) = 0.063, RW(F) = 0.056 for 2719 reflections with I \u3e σ(I)