Flexible photonic sensors realized using printing technologies

Making sensors flexible and thin, is key to apply them on curved, moving surfaces, e.g. for wearable applications or to embed them in mechanical structures. Photonic sensor systems require the integration of microstructures (e.g. polymer waveguides), nanostructures (e.g. gratings), which can be realized using nanoimprint lithography, but may also need additional active or passive optical components, which can be integrated using laser printing technologies

Design and fabrication of blazed gratings for a waveguide-type head mounted display

In a waveguide-type display for augmented reality, the image is injected in the waveguide and extracted in front of the eye appearing superimposed on the real-world scene. An elegant and compact way of coupling these images in and out is by using blazed gratings, which can achieve high diffraction efficiencies. We report the design of blazed gratings for green light (lambda = 543 nm) and a diffraction angle of 43 degrees. The blazed gratings with a pitch of 508 nm and a fill factor of 0.66 are fabricated using grayscale electron beam lithography. We outline the subsequent replication in a polymer waveguide material with ultraviolet nanoimprint lithography and confirm a throughput efficiency of 17.4%. We finally show the in- and outcoupling of an image through two blazed gratings appearing sharp and non-distorted in the environment. (C) 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreemen

Comparison of different polymers and printing technologies for realizing flexible optical waveguide Bragg grating strain sensor foils

Waveguides with Bragg gratings realized on a flat polymer foil are promising candidates for advanced strain sensors since such a planar approach allows precise positioning of multiple sensors in various well-defined directions, in the same foil. As such, an optical version of an electrical strain gage can be realized. Herein, several parameters are discussed which define the behaviour of such sensor foils, in particular the grating design, including the wavelength of operation and mechanical and optical properties of the used polymers. Epoxy and Ormocer®-based Bragg grating sensors operating at 850 nm and 1550 nm wavelength were realized using nano-imprint lithography and laser direct-write lithography and their strain and temperature sensitivities were compared. Finally, it is demonstrated that optical strain gage rosettes can be realized by multiplexing 3 angularly displaced sensors in the same waveguide on a single foil

Imprinted polymer-based guided mode resonance grating strain sensors

Optical sensors based on guided mode resonance (GMR) realized in polymers are promising candidates for sensitive and cost effective strain sensors. The benefit of GMR grating sensors is the non-contact, easy optical read-out with large working distance, avoiding costly alignment and packaging procedures. The GMR gratings with resonance around 850–900 nm are fabricated using electron beam lithography and replicated using a soft stamp based imprinting technique on 175 μm-thick foils to make them suitable for optical strain sensing. For the strain measurements, foils are realized with both GMR gratings and waveguides with Bragg gratings. The latter are used as reference sensors and allow extracting the absolute strain sensitivity of the GMR sensor foils. Following this method, it is shown that GMR gratings have an absolute strain sensitivity of 1.02 ± 0.05 pm / με at 870 nm

Bragg-grating-based photonic strain and temperature sensor foils realized using imprinting and operating at very near infrared wavelengths

Thin and flexible sensor foils are very suitable for unobtrusive integration with mechanical structures and allow monitoring for example strain and temperature while minimally interfering with the operation of those structures. Electrical strain gages have long been used for this purpose, but optical strain sensors based on Bragg gratings are gaining importance because of their improved accuracy, insusceptibility to electromagnetic interference, and multiplexing capability, thereby drastically reducing the amount of interconnection cables required. This paper reports on thin polymer sensor foils that can be used as photonic strain gage or temperature sensors, using several Bragg grating sensors multiplexed in a single polymer waveguide. Compared to commercially available optical fibers with Bragg grating sensors, our planar approach allows fabricating multiple, closely spaced sensors in well-defined directions in the same plane realizing photonic strain gage rosettes. While most of the reported Bragg grating sensors operate around a wavelength of 1550 nm, the sensors in the current paper operate around a wavelength of 850 nm, where the material losses are the lowest. This was accomplished by imprinting gratings with pitches 280 nm, 285 nm, and 290 nm at the core-cladding interface of an imprinted single mode waveguide with cross-sectional dimensions 3 × 3 µm2. We show that it is possible to realize high-quality imprinted single mode waveguides, with gratings, having only a very thin residual layer which is important to limit bend losses or cross-talk with neighboring waveguides. The strain and temperature sensitivity of the Bragg grating sensors was found to be 0.85 pm/µε and −150 pm/°C, respectively. These values correspond well with those of previously reported sensors based on the same materials but operating around 1550 nm, taking into account that sensitivity scales with the wavelength

Thin and flexible polymer photonic sensor foils for monitoring composite structures

Thin and flexible photonic sensor foils are proposed, fabricated and tested as a promising alternative for monitoring composite structures. Sensor foils are implemented using two different optical polymers and as such optimized for multi-axial sensing and embedding within composite materials respectively. It is first shown that those sensor foils allow multi-axial strain sensing by multiplexing a multitude of Bragg grating sensors in a rosette configuration. Secondly, those sensors can be realized in very thin foils (down to 50 μm) making them suitable for embedding in composite materials during their production. This was proven by visually inspecting and by testing the functionality of the embedded sensors. Finally, owing to their low Young’s modulus and flexibility, polymer sensor foils can be bent to small curvature radii and withstand large elongations. Herein, the sensors are bent down to a radius of 11 mm, and elongated by 1.4% without losing functionality

Fabrication and replication of high efficiency blazed gratings with grayscale electron beam lithography and UV nanoimprint lithography

In a waveguide-type display for augmented reality, the image is injected in the waveguide and extracted in front of the eye appearing superimposed on the real world scene. An elegant and compact way of coupling these images in and out is by using blazed gratings, which can achieve high diffraction efficiencies, thereby reducing stray light and decreasing the required power levels. This study investigates the fabrication of blazed gratings with grayscale electron beam lithography and the subsequent replication of the realized 3D grating structures in a polymer material with ultraviolet nanoimprint lithography. As such, diffractive elements are realized on a waveguide sheet, with very good control over the dimensions and the profile of the printed features. Blazed gratings are designed for green light (λ= 543 nm) and a diffraction angle of 43°. Making use of a PMMA resist and by carefully optimizing the electron-beam parameters, electron dose distributions and development step, blazed gratings with a pitch of 508 nm and a fill factor of 0.66 are achieved. Finally, a master is realized with two blazed gratings, 3 cm apart, which are replicated using ultraviolet nanoimprint lithography onto a waveguide sheet. The in- and outcoupling of an image through these two blazed gratings is shown, appearing sharp and non-distorted in the environment, and a throughput efficiency of 17.4% is confirmed