1 research outputs found
Solution Processed AZO Thin Films Prepared from Different Source Materials
Aluminum doped Zinc Oxide films were spin-coated from 1 mol% doped precursors obtained from different
source materials optimizing post-deposition annealing in controlled atmospheres. AZO films were
provided with pre-deposition heating at 500 Β°C in ambient while post-deposition rapid thermal annealing
(RTA) in vacuum and in N2-5%H2 was provided at 400, 500 and 600 Β°C. Dominant ZnO c-axis oriented AZO
films with typical wurtzite crystal structure were obtained. Aluminum nitrate source materials resulted in
comparatively higher conductivity AZO films. We conclude post-deposition annealing in controlled environments
helped increase oxygen vacancies and enhanced grain growth and crystallinity resulting in increased
conductivity. Optical measurements showed an average total transmittance (%T) of about 85 % in
the visible for all the films with a direct allowed band gap of about 3.2