TiO2 films prepared by ultrasonic spray pyrolysis of nanosize precursor

A methodology for the preparation of the TiO2 films, based on the process of ultrasonic spray pyrolysis and usage of TiO2 nanoparticles, with the mean diameter of 45 Angstrom as a precursor, was developed. The X-ray diffraction (XRD) analysis of the TiO2 films revealed the appearance of rutile phase at 620 degreesC. Morphology of the TiO2 films deposited at different temperatures on titanium substrates was investigated by scanning electron microscopy (SEM). The SEM analysis revealed that morphology of the TiO2 films can be adjusted by temperature. It seems that the process of ultrasonic spray pyrolysis provides an easy way to prepare either compact smooth films or films with a porous structure., (C) 2002 Elsevier Science B.V. All rights reserved