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1 research outputs found
The dependence of aluminum nitride thin-film microstructure on the number of low-temperature plasma-enhanced atomic layer deposition process cycles
Author
A.A. Kravtsov
A.B. Sautiev
+42Â more
Assouar
Ayers
Baek
Bläsing
Chen
Eddy
El Hakiki
Eom
Follstaedt
GarcĂa-MĂ©ndez
Goerke
Guo-Qiang
Hardy
Huang
Jun
L.M. Mitrofanenko
Lei
Lipsanen
Liu
Liu
Liu
M.G. Ambartsumov
Matsunami
Matsunami
Matsunami
Mohd Yusoff
Motamedi
Naiini
Ozgit
Paszkowicz
Perng
Riihelä
Rong
S.O. Krandievsky
Sahyoun
Shih
Shin
Sippola
Tarala
V.A. Tarala
Valyukhov
Çörekçi
Publication venue
'Elsevier BV'
Publication date
Field of study
No full text
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