A new energy and angle resolving electron spectrometer - First results

A new energy and angle resolved analyzer for photoelectron spectroscopy is described. This analyzer is based on combining an advanced focusing electron lens system with time-of-flight measurements. A position sensitive detector gives time and position for the electron events. From this information the kinetic energy and start direction are obtained through a transformation procedure, giving both a large luminosity and a very high energy resolution. The instrument analyses the angles of emission of the electrons in a cone with 30 degrees opening angle and simulations show that extremely high energy and angular resolution can be achieved simultaneously. We report the first results from this instrument, obtained at the PM-3 beam line at BESSY (Berlin, Germany). This analyzer opens up new possibilities for angular resolved electron spectroscopy, band-mapping and other applications. (C) 2010 Elsevier B.V. All rights reserved

X-ray absorption spectromicroscopy studies for the development of lithography with a monomolecular resist

Zharnikov M, Shaporenko A, Paul A, Gölzhäuser A, Schow A. X-ray absorption spectromicroscopy studies for the development of lithography with a monomolecular resist. Journal of Physical Chemistry B. 2005;109(11):5168-5174