Materials for x-ray refractive lenses minimizing wavefront distortions

Refraction through curved surfaces, reflection from curved mirrors in grazing incidence, and diffraction from Fresnel zone plates are key hard x-ray focusing mechanisms. In this article, we present materials used for refractive x-ray lenses. Important properties of such x-ray lenses include focusing strength, shape, and the material’s homogeneity and absorption coefficient. Both the properties of the initial material and the fabrication process result in a lens with imperfections, which can lead to unwanted wavefront distortions. Different fabrication methods for one-dimensional and two-dimensional focusing lenses are presented, together with the respective benefits and inconveniences that are mostly due to shape fidelity. Different materials and material grades have been investigated in terms of their homogeneity and the absence of inclusions. Single-crystalline materials show high homogeneity, but suffer from unwanted diffracted radiation, which can be avoided using amorphous materials. Finally, we show that shape imperfections can be corrected using a correction lens

Development of High Aspect Ratio Nano-Focusing Si and Diamond Refractive X-ray optics using deep reactive ion etching

This thesis is devoted to the development of nano-focusing refractive optics for high energy X-rays using planar microelectronic technology. The availability of such optics is the key for the exploitation of high brilliance third and fourth generation X-ray sources. Advancements in the quality of optics available are commensurate with advancements in the fabrication technology. The fabrication process directly influences the quality and performance, so must be understood and controlled. In the first part of this thesis, the development of high aspect ratio Si kinoform lenses is examined. It is shown that control of the re-entrance angle is critical for successful fabrication; in fact, a large re-entrance angle can destroy the lens during the fabrication process. Through an etch study, it was found that as aspect ratio increases, control of the re-entrance angle becomes harder. To control the re-entrance angle for very high aspect ratios, a novel approach based on sacrificial structures was proposed and initial results presented. The second part is dedicated to an experimental study of refractive lenses made from diamond. Due to its low atomic number, relatively high density and very high thermal conductivity, diamond is one of the most desirable lens materials for refractive X-ray optics. However, due to its extreme hardness, it is very difficult to structure into a form suitable for X-ray lenses. To overcome this difficulty a Si moulding technique was used and focusing down to a 400 nm wide spot was achieved. Several obstacles were encountered and successfully overcome. The hardest obstacle was to obtain selective void-free filling in the Si moulds. Several methods were investigated. A method based on a sacrificial oxide layer and an Electrostatic Self-Assembly process was found to be the most useful. The approach discovered in this thesis is not limited to X-ray lenses, but can be applied to a wide variety of high aspect ratio MEMS requiring void-free diamond filling and smooth sidewalls.EThOS - Electronic Theses Online ServiceGBUnited Kingdo

Mg K-edge XANES of sepiolite and palygorskite

We present a study of the Mg K-edge on sepiolite and palygorskite performed at the INFM BEAR beamline at Elettra synchrotron light source (Trieste). These two clays, although having very similar structures, show some different features in their near-edge. Mg is in octahedral coordination with oxygens, hydroxyl groups or water, for both palygorskite and sepiolite. The differences found in the near-edge seem to reflect the fact that, on average, an Mg atom in palygorskite ‘‘sees’’ less Mg in higher coordination shells than sepiolite

Deep reactive ion etching of silicon moulds for the fabrication of diamond x-ray focusing lenses

Diamond is a highly desirable material for use in x-ray optics and instrumentation. However, due to its extreme hardness and resistance to chemical attack, diamond is difficult to form into a structure suitable for x-ray lenses. Refractive lenses are capable of delivering x-ray beams with nanoscale resolution. A moulding technique for the fabrication of diamond lenses is reported. High-quality silicon moulds were made using photolithography and deep reactive ion etching. The study of the etch process conducted to achieve silicon moulds with vertical sidewalls and minimal surface roughness is discussed. Issues experienced when attempting to deposit diamond into a high-aspect-ratio mould by chemical vapour deposition are highlighted. Two generations of lenses have been successfully fabricated using this transfer-moulding approach with significant improvement in the quality and performance of the optics observed in the second iteration. Testing of the diamond x-ray optics on the Diamond Light Source Ltd synchrotron B16 beamline has yielded a line focus of sub-micrometre width. © 2013 IOP Publishing Ltd