Torrey Pines Scientific Hotplate Calibration

This document outlines the standard operating procedure to calibrate the Torrey Pines Scientific hot plates of the University of Pennsylvania Quattrone Nanofabrication Facility

ZEP520A Spin Curves and Dilution Characterization

Spin curves for ZEP520A from ZEON Chemicals for the Singh Center for Nanotechnology were studied under non-diluted and diluted conditions by weight

Spin Curves for MicroChem S1800 (1805, 1813, 1818) Series Positive Resist

Spin curves for MicroChem\u27s S1805, S1813, and S1818 were generated and mapped using the Filmetrics F50. Statistical measurements were performed (N=85) and are reported here

MicroChem S1800 Series Resist Application onto Si

The Quattrone Nanofabrication Facility standard operating procedure for the application of MicroChem S1800 series resist onto an Si wafer is provided in this document

Heidelberg DWL66+ S1805 Contrast Curves

Accurately gauge the optimal machine setting for MicroChem S1805 using the Heidelberg DWL 66+ and obtain contrast curves based on the 2mm and 10mm writehead

Heidelberg DWL66+ S1813 Contrast Curves

Accurately gauge the optimal machine setting for MicroChem S1813 using the Heidelberg DWL 66+ and plot the contrast curves for the 2mm and 10mm writeheads

Heidelberg DWL66+ S1818 Contrast Curves

Accurately gauge the optimal machine setting for MicroChem S1818 using the Heidelberg DWL 66+ and plot the contrast curves for the 2mm and 10mm writeheads